大口径米量级的激光光束质量测量装置标定方法研究  

Research on calibration method of large‐aperture meter‐scale laser beam quality measuring device

作　　者：朱菲 侯再红 王港雨 秦来安 靖旭 吴德成 ZHU Fei;HOU Zaihong;WANG Gangyu;QIN Laian;JIN Xu;WU Decheng(Key Laboratory of Atmospheric Optics,Anhui Institute of Optics and Fine Mechanics,HFIPS,Chinese Academy of Sciences,Hefei 230031,China;Science Island Branch of Graduate School,University of Science and Technology of China,Hefei 230026,China;Advanced Laser Technology Laboratory of Anhui Province,Hefei 230037,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所,中国科学院大气光学重点实验室,安徽合肥230031 [2]中国科学技术大学研究生院科学岛分院,安徽合肥230026 [3]先进激光技术安徽省实验室,安徽合肥230037

出　　处：《量子电子学报》2024年第6期872-880,共9页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金重点项目(41875033)。

摘　　要：随着激光的应用越来越广泛,大口径米量级的激光光束质量测量具有重要的研究价值。为规避大气影响,对大口径米量级的激光光束质量的测量一般采用波前测量法在激光系统出口处直接测量。而为了实现精确测量,则需先对大口径米量级的激光光束质量测量系统进行零点标定。本文提出了一种采用小口径的标定光源对大口径测量系统进行扫描标定的方法,分析了不同扫描方式下由标定光源平行度残余误差引起的光斑质心偏移情况,并对不同扫描方式下不同标定光源平行度残余误差对系统测量精度的影响进行了仿真分析。根据波前复原结果,选择了单向扫描方式,并提出在缩比验证测量系统口径为127 mm时,标定光源平行度残余误差应不大于5μrad;在实际测量系统口径为1.27 m时,标定光源平行度残余误差应不大于0.5μrad。With the increasing application of laser,the quality measurement of laser beams with metersacle large-aperture is of important research value.To avoid the influence of atmosphere,the wavefront measurement method is gernerally used to directly measure the quality of laser beams with meter-scale large-aperture at the outlet of laser systems.In order to achieve accurate measurement,it is necessary to calibrate the zero point of the meter-scale large-aperture measurement system first.A scanning calibration method for the large-aperture measurement system is proposed in this work using a small aperture calibration light source.The errors of the beam spot centroid shift caused by residual errors of the parallelism of the calibration light source under different scanning mode are analyzed,and the influence of residual errors of the parallelism of the calibration light source on the measurement accuracy in different scanning mode is simulated and analyzed.According to the wavefront restoration results,the unidirectional scanning mode is selected,and it is specified that the residual error of the parallelism of the calibration light source is not greater than 5μrad when the aperture of scale validation model system is 127 mm,while the residual error of the parallelism of the calibrated light source for the actual measurement system with 1.27 m aperture is not greater than 0.5μrad.

关 键 词：激光技术 光束质量 大口径米量级的测量系统 零点标定 平行度残余误差 

分 类 号：TN248[电子电信—物理电子学]