一种可调压主动活塞式气体流量标准装置的设计  

Design of a pressure-adjustable active piston gas flow standard device

作　　者：牛立娜 经亚纯 NIU Lina;JING Yachun(The Flow Measurement Institute of Hebei Institute of Metrology,Shijiazhuang 050000,China)

机构地区：[1]河北省计量监督检测研究院流量所,河北石家庄050000

出　　处：《工业计量》2024年第6期29-33,共5页Industrial Metrology

基　　金：国家市场监督管理总局科技计划项目(2021MK017);河北省市场监督管理局科研计划项目(2022ZD01)。

摘　　要：随着微电子机械系统的快速发展,气体微小流量计在环境监测、生物医药、精细化工、半导体、新能源等领域得到了广泛应用。然而,部分仪器具有测量范围宽、准确度高但压力损失较大的特点,常规的气体流量标准难以实现测量。文章通过对现有气体流量标准装置分析比较,指出活塞式气体流量标准装置更适合高精度、高压损气体流量计的计量。在此基础上,本文搭建了一种可调压主动活塞式气体流量标准装置,设计20、200、3000 ml三活塞并联,实现了1~3000 mL/min流量的平稳输出;采用卧式柱型双活塞设计,设有平衡腔和计量腔,实现了0~500 kPa工作压力范围可调;设计了恒压、恒流两种检定或校准模式,可满足不同原理、高压损、微小流量仪表的计量需求。With the rapid evolution of Micro-Electro-Mechanical Systems(MEMS),gas microflow meters have been widely utilized in various fields such as environmental monitoring,biomedicine,fine chemicals,semiconductors,and renewable energy.However,some instruments possess characteristics of a broad measurement range,high accuracy,and significant pressure loss,which pose challenges for conventional gas flow standards.Through an analytical comparison of existing gas flow standard devices,this study highlights that piston-type gas flow standard devices are more suitable for the metering of highprecision,high-pressure-loss gas flow meters.Based on this,a pressure-adjustable active piston gas flow standard device is designed in this paper.The device features a parallel configuration of three pistons with capacities of 20 ml,200 ml,and 3000 ml,enabling a stable output flow rate ranging from 1 to 3000 mL/min.Additionally,it adopts a horizontal cylindrical dual-piston design with balance and metering chambers,achieving an adjustable working pressure range of 0 to 500 kPa.Furthermore,two detection modes,namely constant pressure and constant flow,are designed to meet the metering requirements of high-pressure-loss microflow meters based on different principles.

关 键 词：主动活塞 卧式柱型双活塞 标准装置 可调压 设计方案 检测方案 

分 类 号：TH814[机械工程—仪器科学与技术]