交换版机械手用柔性吸附装置的力学特性及吸附效果分析  

Mechanical Characteristics and Adsorption Effect Analysis of Compliance Changeover Mechanism of Exchange Robot

作　　者：刘颖 关宏武[1] 赵东雷 林继柱 LIU Ying;GUAN Hongwu;ZHAO Donglei;LIN Jizhu(The 45^(th) Research Institution of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2024年第6期58-62,共5页Equipment for Electronic Products Manufacturing

摘　　要：吸附装置作为交换版机械手重要的组成部分,对掩模传输过程中物料的可靠性、安全性和掩模版的变形起关键性作用。通过综合考虑吸附装置的吸附性能、密封性能及对掩模版变形的影响,设计了一种新型柔性吸附装置,通过有限元仿真分析柔性吸附装置对掩模版变形的影响,搭建试验平台,对柔性吸附装置的吸附性能和密封性能进行试验。结果表明,掩模版最大变形为0.85μm,吸附力为52.39 N,掩模版掉落时间为188 s,压降为0.006 7 MPa/20 s,均满足指标需求。As an important part of the exchange robot,the changeover mechanism plays a critical role in the reliability,safety and deformation of the reticle in the reticle transmission process.By comprehensively considering the adsorption performance,sealing performance and influence on the deformation of the reticle of the changeover mechanism,a new type of compliance changeover mechanism is designed,the influence of the compliance changeover mechanism on the deformation of the reticle is analyzed by finite element simulation,and a test bench is built to test the adsorption performance and sealing performance of the compliance changeover mechanism.The results show that the maximum deformation of the reticle is 0.85滋m,and the adsorption force is 52.39 N,the falling time of the reticle is 188 s,and the pressure drop is 0.0067 MPa/20 s,the results all meet the requirement of the index.

关 键 词：柔性吸附装置 有限元分析 掩模版变形 吸附性能试验 密封性能试验 

分 类 号：TN305[电子电信—物理电子学]