面向混流晶圆比例的单臂组合设备自适应调度  

Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing

作　　者：潘春荣[1] 崔煜 熊文清 周浩 罗继亮 Pan Chunrong;Cui Yu;Xiong Wenqing;Zhou Hao;Luo Jiliang(School of Mechanical and Electrical Engineering,Jiangxi University of Science and Technology,Ganzhou 341000,China;College of Computer Science and Technology,Huaqiao University,Xiamen 361021,China;Fujian Engineering Research Center of Motor Control and System Optimal Schedule,Xiamen 361021,China)

机构地区：[1]江西理工大学机电工程学院,江西赣州341000 [2]华侨大学信息科学与工程学院,福建厦门361021 [3]华侨大学福建省电机控制与系统优化调度工程技术研究中心,福建厦门361021

出　　处：《系统仿真学报》2024年第12期2906-2916,共11页Journal of System Simulation

基　　金：国家自然科学基金(72161019);江西理工大学高层次人才科研专项基金(205200100648)。

摘　　要：为解决混流加工使得晶圆的制造过程容易发生死锁和完工节点模糊的问题,以主流的全并行加工两种晶圆的单臂组合设备为研究对象,建立了Petri网模型描述系统运行过程,开发了控制策略以避免系统死锁;基于该Petri网模型分析了尽早加工调度策略运行下系统的调度时间特性,针对单个生产监控周期内共享模块品种切换的不同情形,确定了监控周期内机械手的动作循环序列;以晶圆产出比例为调度目标,开发了一种求解生产方案的自适应调度算法,通过调节共享模块加工晶圆的类型,使每个监控周期内的晶圆产出比例自适应地调整,不断地逼近期望的生产状态。通过实例验证了算法的可行性与有效性。Concurrent processing makes the wafer fabrication process prone to deadlocks and completion node ambiguity.A Petri net model is established to describe the system operation process by taking for the single-arm cluster tools for fully parallel processing of two wafer types as the research object,and a control strategy is developed to avoid the system deadlock.Based on the Petri net model,the temporal properties of the system is analyzed based on earliest starting strategy,and the action cycle sequence of robot is determined during the monitoring cycle for different scenarios of lot switching in a single production monitoring cycle.An adaptive scheduling algorithm is developed to obtain the production schedule,which can adaptively adjust the ratio of wafer output in each monitoring cycle by setting the type of wafers processed in the shared module,so that the desired production state is continuously approached by adjusting the ratio of wafer output in each monitoring cycle.The feasibility and effectiveness of the algorithm are verified by examples.

关 键 词：组合设备 产出比例 PETRI网 生产方案 自适应算法 

分 类 号：TP273.2[自动化与计算机技术—检测技术与自动化装置]