规整微纳米锥结构柔性压力传感器的研究  

Research on Flexible Pressure Sensor with Regularized Micro-nano Cone Shape Structure

作　　者：牛鑫 窦若兮 刘皓[2,3] 孙海博 Niu Xin;Dou Ruoxi;Liu Hao;Sun Haibo(School of Arts,Tiangong University,Tianjin 300387,China;Institute of Smart Wearable Electronic Textiles,Tiangong University,Tianjin 300387,China;School of Textile Science and Engineering,Tiangong University,Tianjin 300387,China)

机构地区：[1]天津工业大学艺术学院,天津300387 [2]天津工业大学智能可穿戴电子纺织品研究所,天津300387 [3]天津工业大学纺织科学与工程学院,天津300387

出　　处：《针织工业》2024年第12期66-70,共5页Knitting Industries

基　　金：国家自然科学基金(51473122);中国博士后科学基金(2016M591390);天津市自然科学基金(18JCYBJC18500);“科技冬奥”重点专项(2019YFF0302105)。

摘　　要：首先利用电化学阳极氧化法,制备锥形阳极氧化铝(C-AAO)模板,然后采用原位聚合法和旋涂法,构建规整微纳米锥结构聚苯胺-聚甲基丙烯酸甲酯(PANI-PMMA)柔性导电膜,最后通过互锁封装制备规整微纳米锥结构柔性压阻传感器,并对规整微纳米锥结构PANI-PMMA导电膜的表面形貌、傅立叶变换红外光谱及传感器的传感性能进行测试分析。结果表明,微纳米锥长度为(1.38±0.03)μm的传感器在0~2.3kPa范围内表现出108.27kPa^(-1)的高灵敏度、2000次载荷加载和卸载下循环稳定性和±4.72%的低迟滞性,并且可以对手腕运动状态和身体运动状态进行监测。Using electrochemical anodization,the conical anodic aluminum oxide(C-AAO)templates were prepared,and the regularized micro-nanocone polyaniline/polymethyl methacrylate(PANI/PMMA)flexible conductive films were constructed by in-situ polymerization and spin-coating methods.The flexible piezo-resistive sensor was prepared by interlocking encapsulation.The surface morphology,Fourier transform infrared spectrum of PANI-PMMA conductive film and sensing performance of the sensor were tested and analyzed.The results show that the sensor with a micronanocone length of(1.38±0.03)μm exhibits high sensitivity of 108.27 kPa^(-1),cyclic stability at 2000 times of loading and unloading and low hysteresis of±4.72%in the range of 0-2.3 kPa,which can monitor wrist motion status and body motion status.

关 键 词：柔性传感器 压力传感器 阳极氧化铝 原位聚合 规整微纳米锥结构 智能可穿戴 运动监测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]