A brief review of the technological advancements of phase measuring deflectometry  

作　　者：Yongjia Xu Feng Gao Xiangqian Jiang 

机构地区：[1]EPSRC Future Metrology Hub,University of Huddersfield,Huddersfield HD13DH,UK

出　　处：《PhotoniX》2020年第1期127-136,共10页智汇光学（英文）

基　　金：funded by the Engineering and Physical Sciences Research Council(EPSRC)of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology(Grand Ref:EP/I033424/1);the EPSRC Future Advanced Metrology Hub(EP/P006930/1).

摘　　要：This paper presents a short review for phase measuring deflectometry (PMD). PMD isa phase calculation based technique for three-dimensional (3D) measurement ofspecular surfaces. PMD can achieve nano-scale form measurement accuracy with theadvantages of high dynamic range, non-contact, full field measurement which makesit a competitive method for specular surface measurement. With the development ofcomputer science, display and imaging technology, there has been an advancementin speed for PMD in recent years. This paper discusses PMD focusing on the difference onits system configuration. Measurement principles, progress, advantages and problems arediscussed for each category. The challenges and future development of PMD are alsodiscussed.

关 键 词：Phase measuring deflectometry 3D measurement Specular surface Phase measurement Fringe analyses 

分 类 号：TN9[电子电信—信息与通信工程]