Wear-resistant surface coloring by ultrathin optical coatings  

作　　者：Jiao Geng Liping Shi Junhuan Ni Qiannan Jia Wei Yan Min Qiu 

机构地区：[1]Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,School of Engineering,Westlake University,Hangzhou,China [2]Institute of Advanced Technology,Westlake Institute for Advanced Study,Westlake University,Hangzhou,China

出　　处：《PhotoniX》2022年第1期281-291,共11页智汇光学（英文）

基　　金：supported by the National Key Research and Development Program of China(2017YFA0205700);the National Natural Science Foundation of China(NO.61927820,No.12004314,No.62105269);Jiao Geng is supported by Zhejiang Province Selected Funding for Postdoctoral Research Projects(No.ZJ2021044);China Postdoctoral Science Foundation(2021M702916);Liping Shi is supported by the open project program of Wuhan National Laboratory for optoelectronics No.2020WNLOKF004;Zhejiang Provincial Natural Science Foundation of China under Grant No.Q21A040010.

摘　　要：We design,fabricate,optically and mechanically characterize wearable ultrathin coatings on various substrates,including sapphire,glass and silicon wafer.Extremely hard ceramic materials titanium nitride(TiN),aluminium nitride(AlN),and titanium aluminium nitride(TiAlN)are employed as reflective,isolated and absorptive coating layer,respectively.Two types of coatings have been demonstrated.First,we deposit TiAlN after TiN on various substrates(TiAlN-TiN,total thicknesses<100 nm),achieving vivid and viewing-angle independent surface colors.The colors can be tuned by varying the thickness of TiAlN layer.The wear resistance of the colorful ultrathin optical coatings is verified by scratch tests.The Mohs hardness of commonly used surface coloring made of Si-/Ge-metals on substrates is<2.5,as soft as fingernail.However,the Mohs hardness of our TiAlN-TiN on substrates is evaulated to be 7-9,harder than quartz.Second,Fano-resonant optical coating(FROC),which can transmit and reflect the same color as a beam split filter is also obtained by successively coating TiAlN-TiN-AlN-TiN(four-layer film with a total thickness of 130 nm)on transparent substrates.The FROC coating is as hard as glass.Such wearable and color-tunable thin-film structural colors and filters may be attractive for many practical applications such as sunglasses.

关 键 词：Abrasion-resistance optical films Structural colors Fano-resonance Titanium aluminium nitride(TiAlN) 

分 类 号：TQ63[化学工程—精细化工]