Detection of surface defects and subsurface defects of polished optics with multisensor image fusion  

作　　者：Huanyu Sun Shiling Wang Xiaobo Hu Hongjie Liu Xiaoyan Zhou Jin Huang Xinglei Cheng Feng Sun Yubo Liu Dong Liu 

机构地区：[1]State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering:International Research Center for Advanced Photonics,Zhejiang University,Hangzhou 310027,China [2]Research Center of Laser Fusion,China Academy of Engineering Physics,No.64 Mianshan Road,Mianyang 621000,China [3]Jiaxing Key Laboratory of Photonic Sensing&Intelligent Imaging,Jiaxing 314000,China [4]Intelligent Optics&Photonics Research Center,Jiaxing Research Institute Zhejiang University,Jiaxing 314000,China.

出　　处：《PhotoniX》2022年第1期398-411,共14页智汇光学（英文）

基　　金：supported by the National Key Research and Development Program of China(2016YFC1400900);National Natural Science Foundation of China(NSFC)(41775023);Excellent Young Scientist Program of Zhejiang Provincial Natural Science Foundation of China(LR19D050001);Fundamental Research Funds for the Central Universities(2019FZJD011);State Key Laboratory of Modern Optical Instrumentation Innovation Program(MOI2018ZD01).

摘　　要：Surface defects(SDs)and subsurface defects(SSDs)are the key factors decreasing the laser damage threshold of optics.Due to the spatially stacked structure,accurately detecting and distinguishing them has become a major challenge.Herein a detection method for SDs and SSDs with multisensor image fusion is proposed.The optics is illuminated by a laser under dark field condition,and the defects are excited to gener-ate scattering and fluorescence lights,which are received by two image sensors in a wide-field microscope.With the modified algorithms of image registration and feature-level fusion,different types of defects are identified and extracted from the scattering and fluorescence images.Experiments show that two imaging modes can be realized simultaneously by multisensor image fusion,and HF etching verifies that SDs and SSDs of polished optics can be accurately distinguished.This method provides a more targeted reference for the evaluation and control of the defects of optics,and exhibits potential in the application of material surface research.

关 键 词：Polished optics Surface defects Subsurface defects MULTISENSOR Image fusion 

分 类 号：TN2[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]