Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing  

作　　者：Xue-Qing Liu Yong-Lai Zhang Qian-Kun Li Jia-Xin Zheng Yi-Ming Lu Saulius Juodkazis Qi-Dai Chen Hong-Bo Sun 

机构地区：[1]State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China [2]Centre for Micro-Photonics,Faculty of Science,Engineering and Technology,Swinburne University of Technology,Hawthorn,VIC 3122,Australia [3]Melbourne Centre for Nanofabrication,ANFF,151 Wellington Road,Clayton,VIC 3168,Australia [4]State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instrument,Tsinghua University,Haidian,Beijing 100084,China.

出　　处：《PhotoniX》2022年第1期475-487,共13页智汇光学（英文）

基　　金：supported by the National Natural Science Foundation of China(NSFC,Grant Nos.61825502,61960206003,61935008 and 62105117);the Scientific Research Project of the Education Department of Jilin Province(JJKH20221005KJ).

摘　　要：Femtosecond laser machining of biomimetic micro/nanostructures with high aspect ratio(larger than 10)on ultrahard materials,such as sapphire,is a challenging task,because the uncontrollable surface damage usually results in poor surface structures,especially for deep scribing.Here,we report an inside-out femtosecond laser deep scribing technology in combination with etching process for fabricating bio-inspired micro/nanostructures with high-aspect-ratio on sapphire.To effectively avoid the uncontrollable damage at the solid/air interface,a sacrificial layer of silicon oxide was employed for surface protection.High-quality microstructures with an aspect ratio as high as 80:1 have been fabricated on sapphire surface.As a proof-of-concept application,we produced a moth-eye inspired antireflective window with sub-wavelength pyramid arrays on sapphire surface,by which broadband(3-5μm)and high transmittance(98%at 4μm,the best results reported so far)have been achieved.The sacrificial layer assisted inside-out femtosecond laser deep scribing technology is effective and universal,holding great promise for producing micro/nanostructured optical devices.

关 键 词：Femtosecond laser Etching ANTIREFLECTION Biomimetic microstructures SAPPHIRE 

分 类 号：TN24[电子电信—物理电子学]