Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride  

作　　者：Adam Raptakis Lefteris Gounaridis Jörn P.Epping Thi Lan Anh Tran Thomas Aukes Moritz Kleinert Madeleine Weigel Marco Wolfer Alexander Draebenstedt Christos Tsokos Panos Groumas Efstathios Andrianopoulos Nikos Lyras Dimitrios Nikolaidis Elias Mylonas Nikolaos Baxevanakis Roberto Pessina Erik Schreuder Matthijn Dekkers Volker Seyfried Norbert Keil RenéG.Heideman Hercules Avramopoulos Christos Kouloumentas 

机构地区：[1]Photonic Communications Research Laboratory,Institute of Communication and Computer Systems,National Technical University of Athens,15573 Zografou,Greece [2]LioniX International BV,P.O.Box 456,7500 AL Enschede,The Netherlands [3]SolMateS BV,Auke Vleerstraat 3,7521 PE Enschede,The Netherlands [4]Fraunhofer Institute for Telecommunications,HHI,1058 Berlin,Germany [5]Polytec GmbH,76337 Waldbronn,Germany [6]Optagon Photonics,Agia Paraskevi 15341,Athens,Greece [7]Cordon Electronics Italia S.R.L,San Martino 7,Agrate Brianza 20864,Italy

出　　处：《PhotoniX》2023年第1期145-171,共27页智汇光学（英文）

基　　金：EU Horizon 2020 research and innovation program under grant agreement 3PEAT(Contract No.780502).

摘　　要：We demonstrate a compact heterodyne Laser Doppler Vibrometer (LDV) based on the realization of optical frequency shift in the silicon nitride photonic integration platform (TriPleX). We theoretically study, and experimentally evaluate two different photonic integrated optical frequency shifters (OFSs), utilizing serrodyne and single- sideband (SSB) modulation. Both OFSs employ stress-optic modulators (SOMs) based on the non-resonant piezoelectrical actuation of lead zirconate titanate (PZT) thin- films, deposited on top of the silicon nitride waveguides with a wafer-scale process. To improve the modulation bandwidth of the SOMs we investigate a novel configuration of the electrodes used for the actuation, where both electrodes are placed on top of the PZT layer. Using this top-top electrode configuration we report frequency shift of 100 kHz and 2.5 MHz, and suppression ratio of the unwanted sidebands of 22.1 dB and 39 dB, using the serrodyne and the SSB OFS, respectively. The best performing SOM structure induces 0.25π peak-to-peak sinusoidal phase-shift with 156 mW power dissipation at 2.5 MHz. We use the SSB-OFS in our compact LDV system to demonstrate vibration measurements in the kHz regime. The system comprises a dual-polarization coherent detector built in the PolyBoard platform, utilizing hybrid integration of InP photodiodes (PDs). High quality LDV performance with measurement of vibration frequencies up to several hundreds of kHz and displacement resolution of 10 pm are supported with our system.

关 键 词：Photonic integration Optical frequency shift Stress-optic PZT Silicon nitride Heterodyne interferometry Laser doppler vibrometry 

分 类 号：TN24[电子电信—物理电子学]