Direct Photolithography of WO_(x) Nanoparticles for High‑Resolution Non‑Emissive Displays  

作　　者：Chang Gu Guojian Yang Wenxuan Wang Aiyan Shi Wenjuan Fang Lei Qian Xiaofei Hu Ting Zhang Chaoyu Xiang Yu‑Mo Zhang 

机构地区：[1]Laboratory of Optoelectronic Information Technology and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,People’s Republic of China [2]Hangzhou Bay Laboratory of Advanced Nano‑Optoelectronic Materials and Devices,Qianwan Institute of CNITECH,Ningbo 315336,People’s Republic of China [3]Smart Materials for Architecture Research Lab,Innovation Center of Yangtze River Delta,Zhejiang University,Jiaxing 314100,People’s Republic of China [4]University of Science and Technology of China,Hefei 230026,People’s Republic of China [5]State Key Lab of Supramolecular Structure and Materials,College of Chemistry,Jilin University,Changchun 130012,People’s Republic of China

出　　处：《Nano-Micro Letters》2025年第3期297-309,共13页纳微快报（英文版）

基　　金：supported by the National Key R&D Program of China(2022YFB3606501,2022YFB3602902);the Key projects of National Natural Science Foundation of China(62234004);the National Natural Science Foundation of China(U23A2092);Pioneer and Leading Goose R&D Program of Zhejiang(2024C01191,2024C01092);Innovation and Entrepreneurship Team of Zhejiang Province(2021R01003);Ningbo Key Technologies R&D Program(2022Z085),Ningbo 3315 Programme(2020A-01-B);YONGJIANG Talent Introduction Programme(2021A-038-B,2021A-159-G);“Innovation Yongjiang 2035”Key R&D Programme(2024Z146);Ningbo JiangBei District public welfare science and technology project(2022C07);the China National Postdoctoral Program for Innovative Talents(grant no.BX20240391);the China Postdoctoral Science Foundation(grant no.2023M743623).

摘　　要：High-resolution non-emissive displays based on electrochromic tungsten oxides(WOx)are crucial for future near-eye virtual/augmented reality interactions,given their impressive attributes such as high environmental stability,ideal outdoor readability,and low energy consumption.However,the limited intrinsic structure of inorganic materials has presented a significant challenge in achieving precise patterning/pixelation at the micron scale.Here,we successfully developed the direct photolithography for WOx nanoparticles based on in situ photo-induced ligand exchange.This strategy enabled us to achieve ultra-high resolution efficiently(line width<4μm,the best resolution for reported inorganic electrochromic materials).Additionally,the resulting device exhibited impressive electrochromic performance,such as fast response(<1 s at 0 V),high coloration efficiency(119.5 cm^(2) C^(−1)),good optical modulation(55.9%),and durability(>3600 cycles),as well as promising applications in electronic logos,pixelated displays,flexible electronics,etc.The success and advancements presented here are expected to inspire and accelerate research and development(R&D)in high-resolution non-emissive displays and other ultra-fine micro-electronics.

关 键 词：Electrochromic Direct photolithography WOx nanoparticles In situ photo-induced ligand exchange High-resolution displays 

分 类 号：TN873[电子电信—信息与通信工程] TB383.1[一般工业技术—材料科学与工程]