多频磁场耦合的绝对式平面二维时栅位移传感器  

Absolute planar two-dimensional time-grating displacement sensor with multi-frequency magnetic field coupling

作　　者：杨继森[1,2,3] 修府 张静 袁俊松 张小龙 YANG Jisen;XIU Fu;ZHANG Jing;YUAN Junsong;ZHANG Xiaolong(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Key Laboratory of Advanced Manufacturing Technology for Automobile Parts,Ministry of Education,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing 400054,China;School of Electrical and Electronic Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]重庆理工大学汽车零部件先进制造技术教育部重点实验室,重庆400054 [3]重庆理工大学时栅传感及先进检测技术重庆市重点实验室,重庆400054 [4]重庆理工大学电气与电子工程学院,重庆400054

出　　处：《光学精密工程》2024年第20期3026-3046,共21页Optics and Precision Engineering

基　　金：国家自然科学基金(No.52175454);重庆市自然科学基金面上项目(No.CSTB2023NSCQ-MSX0382);重庆市教委科学技术研究计划重点项目(No.KJZD-K202301106);重庆市研究生科研创新项目(No.CYS240668)。

摘　　要：针对增量式平面二维时栅位移传感器上电需找零的问题,设计了一种基于多频磁场耦合的绝对式平面二维时栅位移传感器,其采用不同频率分时驱动激励电信号,降低传感器电路功耗的同时,使X,Y方向的信号解耦合二维绝对位置解算更加简单可靠。首先,建立激励线圈磁场分布数学模型,根据空间磁场分布特性分析激励线圈宽度与耦和气隙高度的关系;基于差动结构的增量式二维时栅位移传感器结构,建立对极数互质结构的绝对式平面二维时栅测量模型,并提出一种基于查表方式的二维绝对位置解算新方案,避免了实际应用中测量误差对解算结果的影响;通过电磁场仿真验证了此解算方案的可行性并确定了传感器最佳安装间隙为0.8 mm;最后,制作了传感器样机并搭建二维精密实验平台进行性能测试。实验结果表明,传感器样机在147 mm×147 mm有效测量范围内,X,Y方向的原始测量误差分别为±20.4μm和±21.1μm,其具有上电无需找零的优势,实现了一体式二维绝对位移测量与定位。Aiming at the problem that incremental planar two-dimensional(2-D)time-grating displacement sensors need to be zeroed when they are powered up,an absolute planar 2-D time-grating displacement sensor based on multi-frequency magnetic field coupling was designed,which adopts time-driven excitation signals of different frequencies to reduce the power consumption of the sensor circuit and at the same time make the decoupling of signals in the X and Y directions and the 2-D absolute position solving simpler and more reliable.Firstly,a mathematical model of magnetic field distribution of the excitation coil was established,and the relationship between the width of the excitation coil and the height of the coupled air gap was analyzed according to the characteristics of the spatial magnetic field distribution;based on the incremental 2-D time-grating displacement sensor structure of the differential structure,an absolute planar 2-D time-grating measurement model of the opposite poles reciprocal structure was established,and a new scheme for the 2-D absolute position solution based on the look-up table method was proposed,which avoided the influence of the measurement error on the solution result in the practical application;the feasibility of this solution was verified by electromagnetic field simulation,and the optimal installation gap of the sensor was determined to be 0.8 mm;finally,the sensor prototype was fabricated,and the 2-D precision experimental platform was constructed for performance testing.The experimental results show that the sensor prototype in the effective measuring range of 147 mm×147 mm,the original measurement errors in the X and Y directions are±20.4μm and±21.1μm,respectively,and it has the advantages of no need to find the zero point on power-on,which realizes the all-in-one 2-D absolute displacement measurement and positioning.

关 键 词：多频磁场 对极数互质 绝对式二维 时栅位移传感器 

分 类 号：TH7[机械工程—仪器科学与技术]