MEMS速率陀螺仪力平衡控制回路相位误差分析与验证  

Analysis and verification of phase error in force balance control loop of MEMS rate gyroscope

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作  者:高阳 贾佳 孟琳 阮志虎 曹慧亮 GAO Yang;JIA Jia;MENG Lin;RUAN Zhihu;CAO Huiliang(Artificial Intelligence Industrial Technology Research Institute,Nanjing Institute of Technology,Nanjing 211167,China;College of Automation,Jiangsu University of Science and Technology,Zhenjiang 212003,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区:[1]南京工程学院人工智能产业技术研究院,江苏南京211167 [2]江苏科技大学自动化学院,江苏镇江212100 [3]中北大学仪器与电子学院,山西太原030051

出  处:《光学精密工程》2024年第20期3059-3070,共12页Optics and Precision Engineering

基  金:国家重点研发计划“智能传感器”重点专项(No.2022YFB3205000);国家自然基金重点联合项目(No.U2230206);江苏省高等学校基础科学(自然科学)研究项目(No.24KJB510007);南京工程学院创新基金面上项目(No.CKJB202306)。

摘  要:为明晰基于力平衡(Force to Rebalance,FTR)检测模式的MEMS速率陀螺仪中相位误差对陀螺仪静态和动态性能的影响规律,构建了包含相位误差的FTR速率控制回路模型,以此分析不同相位误差对动静态性能的影响。首先,介绍了采用FTR速率模式的陀螺仪基本原理,简要分析了相位误差对驱动模态的影响。接着,提出了包含反馈通路和前向通路相位误差的FTR速率控制回路模型,并对该模型进行了等效变换。然后,根据上述模型分析不同类型的相位误差对陀螺仪动态和静态性能的影响。最后,进行了相应的试验验证。实验结果表明:反馈通路中的相位误差的两小时测量值的稳定性为0.0949,且该误差仅会改变标度因数;前向通路中的相位误差为温度敏感项,且补偿前后的零偏值和零偏漂移值分别缩小了4.8和2.9倍,零偏不稳定性和角度随机游走分别提升了0.8和0.9倍。反馈通路的相位误差可以通过标度的方法来获取进行补偿,且该误差仅影响标度因数的数值大小,并不影响零偏和带宽性能;前向通路中的相位误差严重制约了静态性能,但室温状态下并不影响动态性能。In order to clarify the influence of phase error on the static and dynamic performance of MEMS rate gyroscopes based on the force to rebalance(FTR)measurement mode,the model of FTR rate control loop with phase error was constructed to analyze the influence of different phase errors on the dynamic and static performance.Firstly,the basic principle of the gyroscope using FTR rate mode was introduced,and the effect of phase error on the driving modes was briefly analyzed.Secondly,the model of FTR rate control loop containing phase errors in the feedback and forward channels was proposed,and an equivalent transformation of the model was performed.Thirdly,the effects of different types of phase errors on the dynamic and static performance of the gyroscope were analyzed according to the above model.Finally,the corresponding experimental validation was conducted.Experimental results indicate that the stability of the two-hourly measured value of the phase error in the feedback channel is 0.0949,and the error only changes the value of scale factor;the bias and bias drift values before and after the compensation of the phase error in the forward channel are reduced by 4.8 and 2.9 times,respectively,and the bias instability and angular random walking are improved by 0.8 and 0.9 times,respectively.The phase error in the feedback channel can be compensated by the calibration,and this error only affects the value of the scale factor,and does not affect the bias and bandwidth performance;the phase error in the forward channel seriously restricts the static performance,but does not affect the dynamic performance at room temperature.

关 键 词:MEMS速率陀螺仪 力平衡控制 相位误差 零偏性能 标度因数 带宽 

分 类 号:TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]

 

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