烧结工艺对掺Al增强氮化铝陶瓷基板的显微结构和性能的影响  

Influence of Sintering Process on Microstructure and Properties of Al Doped Aluminum Nitride Ceramic Substrate

作　　者：赵世泽 林坤吉 张文铎 齐于杰 赵哲[1] ZHAO Shize;LIN Kunji;ZHANG Wenduo;QI Yujie;ZHAO Zhe(School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《热加工工艺》2024年第24期85-91,共7页Hot Working Technology

基　　金：广东省珠江本土创新团队项目(2017BT01C169);广东省基础与应用基础研究基金项目(2022A1515110017)。

摘　　要：选用Y_(2)O_(3)-Al作为烧结助剂,采用流延成型法制备Al N陶瓷。研究了排胶和烧结制度对Al N陶瓷的物相组成、致密度、显微组织、热学及力学性能的影响。结果表明,真空-空气两步排胶法能够减缓排胶过程中Al的氧化,制备的Al N陶瓷第二相孤立分布在三角晶界处,热导率和弯曲强度分别比一步排胶法制备的陶瓷高2.5%和14.8%。随着烧结温度的升高,第二相由YAG转变为Y_(2)O_(3)/Al_(2)O_(3)比较高的YAP,晶格氧含量下降。经过1800℃烧结后,AlN陶瓷的热导率和弯曲强度分别达到了171.23 W·m^(-1)·K^(-1)和(456.77±19.34)MPa。Y_(2)O_(3)-Al was chosen as the sintering additive,AlN ceramics were prepared through the tape casting method.The impacts of the debinding and sintering process on the phase composition,density,microstructure characteristics and thermal and mechanical properties of AlN ceramics were studied.The results show that the mitigation of Al oxidation during the debinding process is accomplished through a vacuum-air two-step debinding program.In the prepared AlN ceramics,the secondary phase is found to be isolated and distributed at the triangular grain boundaries.A measurable enhancement of thermal conductivity and bending strength,by 2.5%and 14.8%respectively,is seen to exceed that achieved with a one-step debinding process.When the sintering temperature is increased,a transition of the secondary phase from YAG to YAP with a higher Y_(2)O_(3)/Al_(2)O_(3) ratio is revealed,the oxygen content in lattice decreases.After being sintered at 1800℃,the thermal conductivity and bending strength of the AlN ceramics are measured to be 171.23 W·m^(-1)·K^(-1) and(456.77±19.34)MPa,respectively.

关 键 词：Al N陶瓷 流延成型 烧结温度 排胶策略 

分 类 号：TG148[一般工业技术—材料科学与工程] TQ174.75[金属学及工艺—金属材料]