高真空镀膜设备真空系统设计  

Design of Vacuum System for High Vacuum Coating Equipment

作　　者：彭军杆 PENG Jungan(Zhuhai Fushan Aixu Solar Energy Technology Co.,Ltd.,Zhuhai,Guangdong Province,519175 China)

机构地区：[1]珠海富山爱旭太阳能科技有限公司,广东珠海519175

出　　处：《大众科学》2024年第14期23-25,共3页China Public Science

摘　　要：真空系统是一种常见的高真空系统结构,其作为真空涂层装备的核心部件,核心部件的选取直接关系到真空的质量。因此,开发出的真空涂层装备必须具有洁净、无油、高动态抽速等特点,常规的扩散泵作为主泵的装置已无法满足需求。介绍了油扩散泵、分子泵和低温泵的特性,以及分子泵和低温泵在真空系统中的应用情况。Vacuum system is a common high vacuum system structure,which is an essential and important component.As the core component of vacuum coating equipment,the selection of its core components directly affects the quality of vacuum.Therefore,the developed vacuum coating equipment must have conventional diffusion pumps such as clean,oil-free,and high dynamic pumping speed as the main pump device,which can no longer meet the requirements.Introduced the characteristics of oil diffusion pumps,molecular pumps,and low-temperature pumps,as well as the application of molecular pumps and low-temperature pumps in vacuum systems.

关 键 词：高真空镀膜设备 真空系统 涂层装备 管道 

分 类 号：TN107[电子电信—物理电子学]