氮化硅微环的共振锁定  

Resonance locking of silicon nitride micro rings

作　　者：张宇萌 文宇杰 何秉秀 成家霖 申恒[1,2] 闫智辉 贾晓军[1,2] ZHANG Yumeng;WEN Yujie;HE Bingxiu;CHENG Jialin;SHEN Heng;YAN Zhihui;JIA Xiaojun(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China)

机构地区：[1]山西大学光电研究所量子光学与光量子器件国家重点实验室,山西太原030006 [2]山西大学极端光学协同创新中心,山西太原030006

出　　处：《中国测试》2024年第12期72-77,共6页China Measurement & Test

基　　金：国家自然科学基金(62122044,61925503,62135008);国家重点研发计划(2022YFA 1404500);山西省“1331工程”重点学科建设计划。

摘　　要：氮化硅微环是一种被广泛应用的集成光学器件,产生用于精密测量的光频梳及用于量子信息的光量子态。其中氮化硅微环的稳定锁定是实现实际应用的关键。该文利用氮化硅微环的热自稳定性与Pound-Drever-Hall(PDH)技术,实现了氮化硅微环的共振锁定。实验中结合高精度的激光波长调谐特性,将其稳定在微环共振波长附近,再通过PDH技术进行共振锁定。结果表明,该锁定技术在氮化硅自身的热自稳定性基础上通过精确锁定氮化硅微环,克服了扰动等影响,实现了不同功率的稳定输出。当输出功率约为38.9 mW时,对应的标准差为0.016 mW。该技术可为氮化硅微环在量子光学等领域的应用提供研究基础。Silicon nitride micro rings are widely used integrated optical devices that generate photonic states for precise measurement of optical frequency combs and quantum information.The stable locking of micro rings is the key to achieving practical applications.This article utilizes the thermal self stability of micro rings and Pound-Drever-Hall(PDH)technology to achieve resonance locking of silicon nitride micro rings.In the experiment,high-precision laser wavelength tuning characteristics were combined to stabilize it near the micro rings resonance wavelength,and then resonance locking was performed using PDH technology.The results indicate that this locking technique,based on the thermal self stability of the micro ring itself,overcomes disturbances and other effects by precisely locking the silicon nitride micro ring,achieving stable output at different powers.When the output power is about 38.9 mW,the corresponding standard deviation is 0.016 mW.This technology has laid the necessary foundation for the application of silicon nitride micro rings in fields such as quantum optics.

关 键 词：氮化硅微环 热自稳定性 PDH技术 锁定精度 

分 类 号：TB9[一般工业技术—计量学] O437.4[机械工程—测试计量技术及仪器]