微型磁控管式离子泵设计及其性能研究  

Design of Miniature Magnetron-Type Ion Pump and Its Performance Study

作　　者：孙雷桔 朱冠卿 毕海林 王旭迪[1] 谢斌平 董金奎 曹青 SUN Leijie;ZHU Guanqing;BI Hailin;WANG Xudi;XIE Binping;DONG Jinkui;CAO Qing(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Fermion instruments(Shanghai)Co.,Ltd.,Shanghai 201906,China)

机构地区：[1]合肥工业大学机械工程学院,合肥230009 [2]费勉仪器科技(上海)有限公司,上海201906

出　　处：《真空科学与技术学报》2024年第12期1026-1032,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家重点研发计划项目(2023YFF0717200);国家自然科学基金青年基金项目(62101172);中央高校基本科研业务费专项资金资助项目(JZ2024HGTG0307);中国博士后科学基金面上资助项目(2023M743110)。

摘　　要：越来越多关于微型离子泵新思路、新想法的产生以及新结构设计的提出,为目前微型真空电子元件的工作和真空度维护等问题提供了更多的解决方法。微型电离真空计与微型溅射离子泵在结构和原理上有许多相似之处,将这两种器件结合在一起,能够同时实现两种功能并且大大减小半导体整体体积,文章在一种微型电离真空计的基础上设计了一种微型溅射离子泵,该离子泵单独作为主泵在10^(-3)Pa-10^(-4)Pa范围抽气效果良好,并可以维持系统真空度;作为辅助泵可以有效加强分子泵在10^(-6)Pa量级的抽速,其离子电流与内部真空度变化趋势相一致,因此该结构可以同时作为冷阴极电离真空计与溅射离子泵使用。The new structural design of the micro ionization pump and the proposal of new ideas play an important role in solving the current maintenance problems of micro vacuum electronic devices.Micro ionization vacuum gauge and micro sputtering ion pump have many similarities in structure and principle;combining these two devices together can realize two functions at the same time and greatly reduce the overall volume of the semiconductor.This paper designs a micro sputtering ion pump based on a micro ionization vacuum gauge.The ion pump has a good pumping effect in the range of 10^(-3)Pa-10^(-4)Pa as a main pump and can maintain the vacuum degree of the system.The improved ion pump has a certain pumping speed in the range of 4×10^(-3)-6×10^(-4)Pa,and as an auxiliary pump,it can effectively strengthen the pumping speed of the molecular pump in the magnitude of 1×10^(-6)Pa,and its ion current is in line with the trend of the internal vacuum,so the structure can be used simultaneously as a cold cathode ionization vacuum gauge and a sputtering ion pump.

关 键 词：真空获得 离子泵 磁控管 微型化 

分 类 号：TB752[一般工业技术—真空技术]