真空电磁感应熔炼TiAlSi合金成分变化特性分析  

Analysis on Characterization of Compositional Changes in TiAlSi Alloy Prepared by Vacuum Electromagnetic Induction Melting

作　　者：李厚彬 李莉 郑建能 朱永有 赵凡 刘玉平 赖建平 王黎 吴成林 LI Houbin;LI Li;ZHENG Jianneng;ZHU Yongyou;ZHAO Fan;LIU Yuping;LAI Jianping;WANG Li;WU Chenglin

机构地区：[1]二重(德阳)重型装备有限公司,四川德阳618000 [2]西南科技大学制造过程测试技术教育部重点实验室,四川绵阳621010 [3]宁波瑞孚工业集团有限公司,浙江宁波315000

出　　处：《大型铸锻件》2024年第6期85-88,93,共5页Heavy Casting and Forging

基　　金：四川省自然科学基金项目(2023NSFSC0873)。

摘　　要：TiAlSiN涂层中Si元素含量是影响涂层性能的关键因素,而TiAlSi合金靶材成分对涂层成分的影响至关重要。本文采用真空电磁感应熔炼技术,使用不同原料配比,熔炼了不同成分的TiAlSi三元合金,研究了熔炼前后各元素含量变化情况,分析了熔炼产物中Si元素含量随熔炼配比的变化规律,并对不同Si元素含量TiAlSi合金的成分、表面形貌及物相组成之间的关联进行分析,为定量成分TiAlSi阴极靶材的熔炼及加工制备提供了依据,为特定成分TiAlSiN涂层的制备奠定了基础。The content of Si element is a key factor affecting the performance of TiAlSiN coatings,and the composition of TiAlSi alloy target material is crucial to the coating composition.In this paper,TiAlSi ternary alloys with different compositions have been melted by the process of vacuum electromagnetic induction melting with different raw material ratios.The changes in the content of various elements before and after the melting process have been studied,and the variation law of Si element content in the melting product with the melting ratio have been analyzed.The correlation among the composition,morphology and phase composition of TiAlSi alloy with different Si element contents have been analyzed,which have provided a basis for the melting,machining and preparation of TiAlSi cathode target materials with quantitative composition,and laid a foundation for the preparation of TiAlSiN coating with specific composition.

关 键 词：真空熔炼 TiAlSi合金 刀具涂层 SI元素 

分 类 号：TF133[冶金工程—冶金物理化学]