塑料薄膜衬底上复合敏感膜热释电传感器的制备  

Preparation of PCLT/P(VDFTrFE) Pyroelectric Sensor Based on Plastic Film Substrate

作　　者：李金华[1] 袁宁一[1] 陈王丽华[2] 

机构地区：[1]江苏石油化工学院信息科学系功能材料实验室,常州213016 [2]香港理工大学应用物理系智能材料研究中心

出　　处：《压电与声光》2002年第6期455-458,475,共5页Piezoelectrics & Acoustooptics

摘　　要：将Sol-Gel法制备的掺钙钛酸镧铅纳米粉粒(PCLT)与聚偏氟乙烯-三氟乙烯(P(VDF-TrFE)均匀复合,作为热释电传感器的敏感膜,比同样制备条件的纯聚偏氟乙烯-三氟乙烯膜的探测优值高约22.4%。并以沉积有35nmITO薄膜的廉价PET塑料为衬底,用旋转涂膜法沉积PCLT/P(VDF-TrFE)复合敏感膜,用Ni-Cr薄膜作上电极,制备了PCLT/P(VDF-TrFE)/PET热释电传感器。PET塑料可有效降低热释电元件的热导,下电极ITO可反射红外辐射,明显提高了传感器的电压响应和降低热释电元件的热噪声。测试结果表明,PCLT/P(VDF-TrFE)/PET热释电传感器的探测率达到3.4×107cmHz1/2W-1,比同样制备条件的体硅衬底传感器高2个数量级以上。Nanosized lead titanate doped with calcium and lanthanum (PCLT) powder obtained by the SolGel method was homogeneously mixed with vinylidene fluoridetrifluoroethylene .The nanocomposite PCLT/P(VDFTrFE) film was used as the sensing film of pyrolectric sensors,whose detective merit was about 22.4% higher than that of sensors using pure P(VDFTrFE).35 nm ITO film was deposited as bottom electrode on PET plastic film substrate,on which PCLT/P(VDFTrFE)was prepared by spincoating,and NiCr film was chosen as upper electrode.PET plastic film substrate could effectively decrease the thermal conductivity of the element and ITO bottom electrode could reflect the infrared irradiation.The voltage responsivity was increased and the thermal fluctuation noise of the pyroelectric element was decreased significantly.The experimental results indicated the specific detectivity of PCLT/P(VDFTrFE)pyroelectric sensors based on PET film substrate reached 34×107 cmHz1/2 W-1,more 2 orders of magnitude higher than that of the sensors on bulk silicon substrate formed under the same conditions.

关 键 词：塑料薄膜 复合敏感膜 热释电传感器 制备 PCLT/P 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]