溶胶-凝胶法制备(Pb_(0.76)Ca_(0.24))TiO_3薄膜及性能研究  

Preparation and Properties of (Pb_(0.76)Ca_(0.24))TiO_3 Thin Films by a Sol-Gel Process

作　　者：蒋力立[1] 唐振方[2] 唐新桂[3] 

机构地区：[1]广东工业大学应用物理系,广州510090 [2]暨南大学物理系,广州510632 [3]中国科学院上海硅酸盐研究所,上海200050

出　　处：《压电与声光》2002年第6期479-481,488,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(59995520)

摘　　要：以硝酸钙、醋酸铅和钛酸丁酯为原料,甲醇做溶剂,乙酰丙酮为稳定剂。用简单的溶胶-凝胶法和快速退火工艺在Pt/Ti/SiO2/Si(100)基片成功地制备出四方钙钛矿相(Pb0.76Ca0.24)TiO3(PCT)薄膜。用原子力显微镜、扫描电镜分析了薄膜的表面和断面形貌;测试了薄膜的铁电和介电特性。PCT薄膜的剩余极化强度和矫顽场分别为36μC/cm2和240kV/cm,在100kHz,薄膜的介电常数和损耗因子分别为295和0.027。Ferroelectric (Pb076Ca024)TiO3(PCT) thin films on Pt/Ti/SiO2/Si (111) substrates were prepared by a simple SolGel process and rapid thermal annealing (RTA),using high pure calcium nitrate tetrahydrate Ca(NO3)2·4H2O,lead acetate hydrate Pb(CH3COO)2·3H2O,and tetrabutyle titanate Ti(OC4H9)4 as starting materials.Methanol CH3OH as a solvent and acetylactone C5H8O2 as a stabilization agent.The PCT film on Pt/Ti/SiO2/Si(111) substrate annealed at 650 °C by RTA for 10 min,the Pr and Ec of the PCT thin film are 36 μC/cm2 and 240 kV/cm,respectively at 1 kHz;the εr and tan δ of the PCT thin film are 295 and 0027,respectively,at 100 kHz.

关 键 词：溶胶-凝胶法 制备 (Pb0.76Ca0.24)TiO3薄膜 PCT铁电薄膜 介电特性 铁电材料 

分 类 号：TM221[一般工业技术—材料科学与工程]