液晶显示器技术及其曝光设备(续)  

The Situation of LCD Technology and Exposure System (Continued)

作　　者：童志义[1] 葛劢冲[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,甘肃平凉744000

出　　处：《电子工业专用设备》2002年第3期125-130,共6页Equipment for Electronic Products Manufacturing

摘　　要：介绍了LCD器件类型和生产线概况及器件市场与发展现状 ,根据LCD器件对曝光设备的工艺特点 ,重点介绍了几种用于LCD制造的曝光设备 ,结合LCD器件目前的发展趋势 ,讨论了曝光设备面临的新课题。This paper describes the market and the development situation,the types and the fabs survey of LCD.According to the process characteristic of LCD production exposure system, mainly introducing several kinds of exposure system used for LCD production.Combining the current developing trend of LCD,discuss the new problem with which exposure system faced.

关 键 词：液晶显示器 曝光设备 LCD器件 LCD市场 生产线 发展趋势 

分 类 号：TN873.93[电子电信—信息与通信工程]