粗糙表面散射光强分布的特征参数研究  

Research on the characteristic parameters of scattered light intensity distribution of rough surface

作　　者：王爱囡[1] 

机构地区：[1]合肥工业大学理学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2002年第6期1248-1251,共4页Journal of Hefei University of Technology：Natural Science

摘　　要：论述了能反映粗糙表面散射光分布特性的合适参数。根据光电子统计学理论,得出了工件粗糙表面反射光的散射光强分布,建立了评价反映粗糙表面散射光强分布特征的二阶中心矩SN与Rq关系的数学模型和相应的测试系统。通过CCD线阵接受散射光分布信号,由微机进行处理后所得实验结果与泰勒仪对同一粗糙表面的测量结果相吻合,证明所采用的评价粗糙度参数可靠。In this paper, the suitable parameter that can represent the distributive characteristics of the scattered light from rough surface is investigated. Based on the statistics theory of optical electronics, the reflecting light intensity distribution of the scattered light from rough surface of a workpiece is obtained. The mathematical model that evaluates the relations between Rq and the secondorder central moment SN which represents the scattered light intensity distribution of rough surface is established, and a new measuring system presented. The scattered light distribution is detected by a linear CCD image sensor which is connected to a microcomputer for further process. Experimental research shows that the results are coincident with those of Talysurf's, and the parameters that evaluate the surface roughness are reliable.

关 键 词：粗糙表面 散射光强度分布 特征参数 激光 二阶中心矩 数学模型 测试系统 工件加工 表面粗糙度 

分 类 号：TH161.14[机械工程—机械制造及自动化] TG8[金属学及工艺—公差测量技术]