基于四波前横向剪切干涉仪的激光波前测试技术研究  

Study of Lased Wavefront Testing Technique for Laser Based on Quadri-Wave Lateral Shearing Interferometer

作　　者：时凯[1] 苏俊宏[1] 白兆峰 

机构地区：[1]西安工业大学光电工程学院,陕西西安710021

出　　处：《光学与光电技术》2015年第6期63-66,共4页Optics & Optoelectronic Technology

基　　金：陕西省教育厅重点实验室科研计划(15JS037)资助项目

摘　　要：四波前横向剪切干涉仪的出现为精确、快速地测试激光波前信息提供了很好的研究方法。概述了四波前横向剪切干涉仪的测试原理,对532nm半导体激光器和ZYGO-GPI干涉仪标准激光源的光束波前进行测试,得到平均椭偏率分别为0.977和0.900。通过对测量数据与激光器标称参数对比分析得出四波前横向剪切干涉仪能够精确地测量激光波前信息。Quadri-wave lateral shearing interferometer provides a useful method for studying the laser wavefront testing in accurately and rapidly.The test principle of quadri-wave lateral shearing interferometer is given in this paper.Wavefront information of semiconductor laser at 532 nm and ZYGO-GPI interferometer laser are tested based on SID4 wavefront sensor.the ellipticity obtained is 0.977 and 0.900.As a result,quadri-wave lateral shearing interferometer can precisely test the wavefront through compared with the test results with the nominal value of laser.

关 键 词：剪切 波前 二维光栅 哈特曼传感器 干涉 

分 类 号：TH744.3[机械工程—光学工程]