基于锑化铟的印章型高灵敏度太赫兹超表面折射率传感器设计  

Design of Seal Type High Sensitivity Terahertz Metasurface Refractive Index Sensor Based on Indium Antimonide

作　　者：李聪[1,2,3,4] 吴倩楠 LI Cong;WU Qiannan(School of Semiconductor and Physics,North University of China,Taiyuan Shanxi 030051,China;College of Instrumentation and Intelligent Future Technology,North University of China,Taiyuan Shanxi 030051,China;The Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan Shanxi 030051,China;The Center for Microsystem Integration,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]中北大学半导体与物理学院,山西太原030051 [2]中北大学仪器与智能未来技术学院,山西太原030051 [3]中北大学前沿交叉科学研究院,山西太原030051 [4]中北大学微系统集成研究中心,山西太原030051

出　　处：《传感技术学报》2024年第12期2023-2028,共6页Chinese Journal of Sensors and Actuators

摘　　要：对一种基于锑化铟材料的太赫兹超表面折射率传感器进行了理论研究和仿真验证。利用频域有限差分法对该反射器的反射性能进行研究和分析,通过优化材料厚度、刻蚀结构周期长度及宽度等,确定了可以同时提高灵敏度和反射率的特征尺寸并分析了透射和反射光谱。结果表明,该传感器在0~1.0 THz工作频段内的最大折射率灵敏度和品质因数分别为620 GHz/RIU和25.2,比传统的传感器灵敏度高三倍。这种折射率传感器设计可为蛋白质浓度、病毒、和癌细胞及其标记物等生物检测领域提供一种技术方法。A terahertz metasurface refractive index sensor based on indium antimonide material is theoretically investigated and experimen-tally verified.The reflection performance of the reflector is analyzed by using the frequency-domain finite difference method,and the thick-ness of the material and the length and width of the etched structure period are optimized to achieve high sensitivity and reflectivity.The simulation results show that the maximum refractive index sensitivity and the figure of merit of this metasurface sensor are 620 GHz/RIU and 25.2,respectively in the 0-1.0 THz frequency band,which is three times more sensitive than the traditional sensor.The refractive in-dex sensor provides a high sensitive detection method for protein concentration measurement,virus detection,and determination of cancer cells and their markers.

关 键 词：生物传感器 超表面 频域有限差分法 太赫兹 高灵敏度 

分 类 号：O433[机械工程—光学工程]