复合腔高温法珀加速度传感器的设计与实验  

Design and experiment of high temperature Fabry-Perot acceleration sensor with composite cavity

作　　者：秦锋 郑渟渟 谭佳航 王宁[1] QIN Feng;ZHENG Tingting;TAN Jiahang;WANG Ning(Key Laboratory of Optoelectronic Technology&Systems,Ministry of Education,College of Optoelectronic Engineering,Chongqing University,Chongqing 400044,China)

机构地区：[1]重庆大学光电工程学院光电技术及系统教育部重点实验室,重庆400044

出　　处：《光学精密工程》2024年第21期3174-3183,共10页Optics and Precision Engineering

基　　金：国家自然科学基金面上项目(No.51875067)。

摘　　要：针对铅铋堆高温高压液态流动金属环境下(500℃,2 MPa),堆内组件流致振动磨损监测中高灵敏度、小量程振动监测的需求,提出了一种基于MEMS工艺的复合腔高温法珀加速度传感器。依据十字梁-质量块敏感结构的力学模型,分析了不同结构参数对传感器灵敏度、量程和一阶固有频率的影响,从而确定敏感结构的尺寸参数。然后,采用双面键合工艺实现复合腔传感器芯片的加工,并完成传感器的封装及制作。最后,搭建传感器测试平台,测试了传感器的动态特性、灵敏度、量程及温度特性。实验结果表明:传感器的工作温度可达500℃,在2~30 Hz的频率内能够实现7.69 nm/g的灵敏度,量程为-11g~11g,分辨率为0.04g。该加速度传感器能够满足铅铋堆内的流致振动测量的需求,有望实现燃料组件磨损状态的有效监测。This study presents the development of a novel MEMS-based Fabry-Perot accelerometer with a composite cavity,designed for high-sensitivity,small-range vibration monitoring in the extreme conditions(500°C,2 MPa)of lead-bismuth reactors.To optimize the sensor′s performance,a detailed analysis was conducted using a mechanical model of a cross-beam and mass block structure to evaluate the influence of structural parameters on sensitivity,measurement range,and resonant frequency.This analysis guided the determination of optimal design parameters for the sensitive structure.The chip structure,featuring a composite cavity,was fabricated through a precise double-sided bonding process,ensuring the achievement of the required mechanical properties and thermal stability.Following fabrication,the sensor was assembled and manufactured to conform to stringent design specifications.A dedicated testing platform was established to evaluate the sensor′s dynamic characteristics,sensitivity,operational range,and thermal performance under high-temperature conditions.Experimental results demonstrated the sensor′s robust functionality,maintaining performance at temperatures up to 500℃,and achieving a high sensitivity of 7.69 nm/g within a frequency range of 2-30 Hz.The device provides a measurement range from-11g to+11g with a resolution of 0.04g,enabling precise detection of flow-induced vibrations critical for wear monitoring in reactor components.These attributes enable effective assessment of the wear state of fuel assemblies,a key factor in reactor safety and operational reliability.The accelerometer′s high sensitivity and operational reliability underscore its potential as an advanced tool for early detection of vibration-induced component wear in extreme environments.This development marks a significant contribution to improving reactor safety and efficiency,offering a powerful solution for proactive maintenance and monitoring in lead-bismuth reactors.

关 键 词：加速度传感器 复合腔 高温 振动测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]