原子层热电堆热流传感器动态校准技术研究  

Research on Dynamic Calibration Technology of Atomic-layer Thermopile Heat Flow Sensor

作　　者：郭子聪 李建民[1] 赵成文 梁海坚 王高[1] GUO Zicong;LI Jianmin;ZHAO Chengwen;LIANG Haijian;WANG Gao(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;Shanxi Jiangyang Chemical Co.,Taiyuan 030051,China;School of Software,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学信息与通信工程学院,太原030051 [2]山西江阳化工有限公司,太原030051 [3]中北大学软件学院,太原030051

出　　处：《宇航计测技术》2024年第6期64-68,82,共6页Journal of Astronautic Metrology and Measurement

基　　金：航空科学基金资助(202300340U0002)。

摘　　要：传统热流传感器动态校准方法,如热风洞法、激波管法等,已不能适应未来高速热流传感器的动态校准需求,存在输出热流小、热流不均匀、信号单一等问题。文中所搭建的动态测试平台,采用半导体激光器作为热流源,可以产生阶跃、脉冲、方波、扫频正弦等激励信号。时域上利用脉冲信号对传感器进行动态校准,测得其时间常数最大为87μs,且脉冲宽度在一定范围内变化时,时间常数的变化较小;频域上利用周期性的方波信号对传感器进行动态校准,通过FFT(Fast Fourier Transform,快速傅里叶变换)得到传感器与光电探测器的频谱特性曲线计算幅值比并做归一化,得到其响应频率为2160 Hz。The traditional dynamic calibration methods of heat flow sensors,such as the thermal wind tunnel method and the excitation tube method,can no longer adapt to the future demand for dynamic calibration of high-speed heat flow sensors,and there are problems such as small output heat flow,uneven heat flow,and single signal.Using a semiconductor laser as the heat flow source,the built dynamic test platform is capable of generating excitation signals such as step,pulse,square wave and swept sine.On time domain,using pulse signals for dynamic calibration of the sensor,the time constant was measured at a maximum of 87μs,and the change of time constant is small when the pulse width changes within a certain range;on frequency domain,using a periodic square wave signal sensor for dynamic calibration,through the FFT(Fast Fourier Transform),the sensor and photodetector spectral characteristic curve to calculate the amplitude ratio is obtained and the normalization is carried out to get the frequency of its response at 2160 Hz.

关 键 词：热流传感器 动态校准 时间常数 响应频率 

分 类 号：TH89[机械工程—仪器科学与技术] V19[机械工程—精密仪器及机械]