单晶硅太阳电池的分步制绒工艺研究  

RESEARCH ON STEP-BY-STEP MAKING PROCESS OF MONO-Si SOLAR CELLS

作　　者：曹文学 郭望东 孙敬红 晏海刚 王慧芳 张绳亮 Cao Wenxue;Guo Wangdong;Sun Jinghong;Yan Haigang;Wang Huifang;Zhang Shengliang(YiWu JingAo Solar Co.,Ltd.,Jinhua 322000,China)

机构地区：[1]义乌晶澳太阳能科技有限公司,金华322000

出　　处：《太阳能》2024年第12期84-89,共6页Solar Energy

摘　　要：制绒工艺是单晶硅太阳电池制备过程中的一个重要环节,其对于提升太阳电池的整体电性能至关重要。在工业化大规模生产中,单晶硅太阳电池的制绒工艺主要依托于氢氧化钠溶液体系。该溶液体系巧妙利用了单晶硅不同晶面间显著的腐蚀差异性特点。当与低浓度氢氧化钠溶液接触时,这种腐蚀差异性得以充分发挥,进而驱动单晶硅表面演化出类似“金字塔”结构的微米级绒面形态。提出了不同于常规一步制绒工艺的分步制绒工艺,通过调整制绒槽的连接方式,实现了对绒面的再处理。针对不同制绒工艺对单晶硅片表面参数、微观形貌、膜层厚度及PERC太阳电池电性能的影响进行了对比分析。分析结果显示:1)相较于采用常规制绒工艺,采用分步制绒工艺后,单晶硅片表面的绒面高度、反射率均出现了下降,且出绒率有所提升;2)由分步制绒工艺得到的硅片表面“金字塔”结构较为密集,“金字塔”大小较为均匀,优于常规制绒工艺得到的“金字塔”;3)与采用常规制绒工艺后制备得到的PERC太阳电池相比,采用分步制绒工艺后制备得到的PERC太阳电池在光电转换效率、短路电流、填充因子方面均存在优势。The velvet making process is an important step in the preparation of mono-Si solar cells,which is crucial for improving the overall electrical performance of solar cells.In large-scale industrial production,the velvet making process of mono-Si solar cells mainly relies on the sodium hydroxide solution system.This solution system cleverly utilizes the significant corrosion differences between different crystal planes of mono-Si.When in contact with low concentration sodium hydroxide solution,this corrosion difference is fully utilized,which drives the evolution of micro scale textured morphology similar to a"pyramid"structure on the surface of mono-Si.Unlike the conventional one-step velvet making process,this paper proposes a step-by-step velvet making process that achieves the reprocessing of the velvet surface by adjusting the connection method of the velvet making groove.Some analyses are conducted on the effects of different velvet making processes on the surface parameters,microscopic morphology,film thickness of mono-Si wafers,and PERC solar cell electrical performance.The analysis results show that:1)Compared with the conventional velvet making process,the use of a step-by-step velvet making process resulted in a decrease in the velvet height and reflectivity on the surface of the mono-Si wafer,and an increase in the velvet yield.2)The surface"pyramid"structure of the silicon wafer obtained by the step-by-step velvet process is more dense,and the size of the"pyramid"is more uniform,which is better than the"pyramid"obtained by the conventional velvet process.3)Compared with PERC solar cells prepared by step-by-step velvet processing,PERC solar cells prepared by stepwise velvet processing have advantages in photoelectric conversion efficiency,short-circuit current,and fill factor.

关 键 词：单晶硅太阳电池 制绒工艺 分步制绒 绒面优化 电性能 

分 类 号：TM615[电气工程—电力系统及自动化]