双极端对比检测法定量分析高纯石英砂气液包裹体含量  

Quantitative Detection of Gas-Liquid Inclusions in High-Purity Quartz Sand by Double Extreme Case Analysis

作　　者：樊婷 任子杰[1,2,3] 张乾坤 何宇豪 宋昱晗 刘志[4] 向璐 FAN Ting;REN Zijie;ZHANG Qiankun;HE Yuhao;SONG Yuhan;LIU Zhi;XIANG Lu(School of Resources and Environment Engineering,Wuhan University of Technology,Wuhan 430070,China;Key Laboratory of Green Utilization of Critical Non-Metallic Mineral Resources,Ministry of Education,Wuhan 430070,China;Hubei Key Laboratory of Mineral Resources Processing and Environment,Wuhan 430070,China;Jingchi Technology(Wuhan)Co.,Ltd.,Wuhan 430070,China)

机构地区：[1]武汉理工大学资源与环境工程学院,湖北武汉430070 [2]关键非金属矿产资源绿色利用教育部重点实验室,湖北武汉430070 [3]矿物资源加工与环境湖北省重点实验室,湖北武汉430070 [4]晶驰科技(武汉)有限公司,湖北武汉430070

出　　处：《岩矿测试》2024年第6期892-900,共9页Rock and Mineral Analysis

基　　金：国家科技重大专项项目(2024ZD0605400)。

摘　　要：高纯石英砂作为半导体、光伏等战略新兴行业的关键材料,其质量对单晶硅坩埚、石英管等产品的应用至关重要。除杂质元素外,气液包裹体是影响高纯石英质量的重要因素之一,但目前对石英气液包裹体的检测方法多为定性描述,缺乏高效精确的定量分析手段。本文提出了一种双极端对比(Doubleextreme caseanalysis,DECA)检测法,能够快速、定量地评估气液包裹体含量。具体流程包括:将药剂浸泡石英砂片置于显微镜下观察并拍摄,总计获取不少于300个石英砂颗粒的显微照片,其中石英砂呈透明状,而气液包裹体呈黑色,通过图像统计计算得到石英砂通透颗粒(T)和不通透颗粒(NT)比例两个数据,以此来评价石英砂品质。通过研究不同石英砂DECA检测结果及坩埚能力,结果表明,T比例较高、NT比例较低的石英砂制备的坩埚透明度优良;而T比例较低、NT比例较高的石英砂制品透明层质量显著下降。该方法有效地解决了气液包裹体检测中定量化不足的难题,为高纯石英砂品质评估提供了可靠依据。High-purity quartz sand serves as a critical material in various strategic emerging industries,such as semiconductors and photovoltaics.The quality of quartz sand is crucial for the application of products like single crystal silicon crucibles and quartz tubes.Besides impurity elements,gas-liquid inclusions are a significant factor affecting quartz quality.However,current detection methods for gas-liquid inclusions are mainly qualitative,lacking efficient and precise quantitative analysis techniques.The double extreme case analysis(DECA)method is innovatively proposed here to quantitatively assess the content of gas-liquid inclusions.The process involves quartz sand slices treated with reagent and put under a microscope for observation and photographing,obtaining at least 300 images of quartz particles where the quartz appears transparent and the inclusions appear black.By statistically analyzing the images,the ratio of transparent(T)to non-transparent(NT)particles is calculated to evaluate quartz quality.The crucible study of different quartz sands using DECA shows that quartz sand with a high T ratio and low NT ratio produces crucibles of excellent transparency,while quartz sand with a low T ratio and high NT ratio results in poor transparency.This method effectively addresses the challenge of quantitative gas-liquid inclusion detection and provides a reliable basis for evaluating high-purity quartz sand quality.

关 键 词：高纯石英 气液包裹体 定量 双极端对比检测法 石英坩埚 

分 类 号：TD97[矿业工程—选矿]