高增益高带宽电子探测互阻放大电路研究  

Research on High-Gain and High-Bandwidth Transimpedance Amplification Circuit for Electron Detection

作　　者：董梓铭 Ziming Dong(Yangzhou High School of Jiangsu Province,Yangzhou,Jiangsu,225002,China)

机构地区：[1]扬州中学,江苏扬州225002

出　　处：《信息工程期刊(中英文版)》2024年第2期7-12,共6页Scientific Journal of Information Engineering

摘　　要：互阻放大电路作为前置放大器,在光通信、红外测量、半导体量测设备等领域应用广泛,但是其增益与带宽等动态可靠性的自相矛盾一直是困扰其高速应用的难题。吞吐量一直是困扰SEM系统的重大瓶颈之一,高速电子探测前置放大电路对于获得高吞吐量的扫描电子显微镜系统至关重要。本文利用专业仿真软件模拟分析了研究高速互阻放大电路的动态稳定性,说明了米勒补偿电容以及电子探测器等效输入电容对系统动态特性的影响,最终设计出增益高达20kΩ带宽超过12MHz的高动态稳定性的互阻放大电路。As a preamplifier,the transimpedance amplification circuit is widely used in optical communication,infrared measurement,semiconductor measurement equipment and other fields.However,the contradiction between its gain,bandwidth and other dynamic reliability has always been a problem for its high-speed application.Throughput has always been one of the major bottlenecks plaguing SEM systems,and high-speed electron detection pre-amplification circuits are essential to obtain high-throughput scanning electron microscope systems.In this paper,the dynamic stability of the high-speed transimpedance amplification circuit is simulated and analyzed by using professional simulation software.The influence of Miller compensation capacitance and the equivalent input capacitance of the electronic detector on the dynamic characteristics of the system is illustrated.Finally,a highly stable transimpedance amplification circuit with a gain of up to 20kΩand a bandwidth of more than 12MHz is designed.

关 键 词：电子探测器 互阻放大电路 高增益 高带宽 等效输入电容 

分 类 号：TN9[电子电信—信息与通信工程]