激光干涉测量中数据驱动的齿轮装夹误差校正方法  

Data-driven Correction of Gear Clamping Errors in Laser Interferometry

作　　者：任拓 杨鹏程[1] 李小成 窦恩泽 朱新栋 REN Tuo;YANG Pengcheng;LI Xiaocheng;DOU Enze;ZHU Xindong(College of Electrical and Mechanical Engineering,Xi′an University of Engineering,Xi′an 710048,China;Key Laboratory of Non-equilibrium Synthesis and Regulation of Matter,School of Physics,Xi′an Jiaotong University,Xi′an 710049,China)

机构地区：[1]西安工程大学机电工程学院,西安710048 [2]西安交通大学物理学院物质非平衡合成与调控教育部重点实验室,西安710049

出　　处：《光子学报》2024年第12期217-228,共12页Acta Photonica Sinica

基　　金：陕西省科学厅自然科学基金研究计划(No.2022JM-219);西安工程大学研究生创新基金(No.chx2024008);国家自然科学基金青年项目(No.51905412)。

摘　　要：激光干涉是测量斜齿轮齿面形貌误差的有效方法,干涉图像作为测量中采集到的原始数据,其质量的优劣直接影响到最终的测量精度。测量中,被测齿轮的精确装夹位置直接决定了采集到的干涉图像的信息完整性和可处理性,是进行齿面全域、高精度测量的前提和关键条件之一。提出一种数据驱动的齿轮装夹误差矫正方法,以便获得高质量的干涉图像。首先,通过收集实测与仿真数据,构建数据驱动数据集;其次,在轴倾角方向计算一维标定点,得出几何畸变指标随装夹位置变化趋势,预测装夹误差方向;然后,以被测齿面干涉图像中的遮挡比作为桥梁建立实测与仿真干涉图像的映射关系,并最优倾角逼近来计算调整角度;最后,根据畸变规律验证调整效果。设计了相关实验,通过该方法调整后能够显著提高干涉图像的质量,验证了所提方法的可行性与正确性,为干涉图像测量精度的提升提供了技术支撑和实现手段。With the advantages of high efficiency,high precision and non-destructiveness,laser interferometry has been widely used in the measurement of surface topography errors of objects.Surface morphology quality is an important indicator of gear manufacturing accuracy,and its micron-level,or even submicron-level error will also directly affect the stress distribution on the surface contact surface of the parts and transmission performance,not only the overall performance of the equipment,but also related to the length of service life.During the measurement process,the quality of the interferometric image,as the key data information collected,has a direct impact on the measurement accuracy.Laser interference is an effective method to measure the geometrical error of helical gear teeth,and the quality of the interference image,as the raw data collected in the measurement,directly affects the final measurement accuracy.In the measurement,the precise clamping position of the measured gear directly determines the information integrity and processability of the acquired interference image,which is one of the prerequisites and key conditions for full-area,high-precision measurement of the tooth flank.The article proposes a data-driven gear clamping error correction method in order to obtain high-quality interferometric images.First,the data-driven dataset is constructed by collecting measured and simulated data;secondly,one-dimensional calibration points were calculated in the direction of shaft inclination to derive the trend of geometric distortion index with clamping position and predict the direction of clamping error;then,the masking ratio in the measured tooth interference image is used as a bridge to establish the mapping relationship between the measured and simulated interference images,and the optimal inclination approximation is used to calculate the adjustment angle;finally,the rationality of adjustment is verified according to the distortion law.Relevant experiments were designed,and the results showed that the a

关 键 词：激光干涉 干涉图像 数据驱动 齿轮装夹误差 几何畸变 

分 类 号：TN249[电子电信—物理电子学]