Mo含量对AlCrMoSiN涂层微观结构和性能的影响  

Effects of Mo Content on Microstructure and Properties of AlCrMoSiN Coatings

作　　者：张冬青 刘艳梅[1] 王子铭 张晓松 李壮 曹凤婷 范其香[1] 王铁钢[1] ZHANG Dongqing;LIU Yanmei;WANG Ziming;ZHANG Xiaosong;LI Zhuang;CAO Fengting;FAN Qixiang;WANG Tiegang(Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin 300222,China;Changzhou NRB Corporation,Jiangsu Changzhou 213022,China)

机构地区：[1]天津职业技术师范大学、天津市高速切削与精密加工重点实验室,天津300222 [2]常州光洋轴承股份有限公司,江苏常州213022

出　　处：《表面技术》2025年第1期32-41,52,共11页Surface Technology

基　　金：中央引导地方科技发展资金(24ZYCGCG00520);天津市自然科学基金项目(22JCZDJC00670,22JCYBJC01600)。

摘　　要：目的解决AlCrSiN涂层在高速干切削工况下耐磨性不足,其服役寿命大幅降低的难题。方法采用高功率脉冲磁控溅射和脉冲直流磁控溅射复合技术,对AlCrMoSiN涂层中的Mo含量进行优化,研制一系列具有不同Mo含量的AlCrMoSiN涂层,通过调节CrMo靶溅射功率,改变涂层中的Mo含量。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和高分辨透射电子显微镜(HRTEM)、纳米压痕仪、纳米划痕仪、高温摩擦磨损试验机等检测设备对涂层微观形貌、物相组成、力学性能、摩擦学行为进行表征。结果随Mo含量的增加,AlCrMoSiN涂层的晶粒尺寸增大,涂层厚度增加;XRD衍射峰向大角度偏移,并在(111)和(200)晶面上择优取向明显,涂层中逐渐形成以fcc-(Al,Cr,Mo)N固溶相为主的结构。Mo元素的掺杂使涂层内部出现晶格畸变现象,在一定程度上增强了涂层的韧性。当涂层中Mo的原子数分数达到21.3%时,涂层的特征值H/E和临界载荷达到最高,分别为0.059和67.62 N,涂层的摩擦因数为0.54,磨损率最低为7.97×10^(–4)μm^(3)/(N·μm)。结论Mo元素的掺杂提高了AlCrMoSiN涂层的结晶度,当Mo的原子数分数为21.3%时,涂层的耐磨损性能最佳。AlCrSiN coating has broad application prospects in the field of cutting because of its high hardness and stable chemical properties.However,in the processing environment of high speed,high temperature and dry cutting,the wear resistance of the AlCrSiN coating is poor,resulting in cracks or even spalling of the coating,which seriously limits its superior performance.Therefore,it is urgent to develop a new tool coating with self-lubricating properties suitable for high temperature working environments.If a certain appropriate amount of Mo element is introduced into the AlCrSiN coating,it is expected to produce lattice distortion and strengthen the grain boundary through the replacement of Mo atoms with metal atoms in the nitride lattice,thereby improving the performance of the coating.At the same time,Mo element has the characteristic of easy oxidation at high temperature,and MoO_(3) lubricating films with low shear modulus can be formed during the friction process,which will effectively improve the wear resistance of the coating.However,when the content of Mo element is too high,the mechanical properties of the coating will be seriously reduced,and the coating is prone to cracking or spalling.On the contrary,when the Mo content is too low,the anti-friction effect is not obvious.In this study,the Mo content in the AlCrMoSiN coating was optimized by high power pulsed magnetron sputtering and pulsed DC magnetron sputtering composite technology.AlCrSi alloy(atomic ratio 6∶3∶1),CrMo alloy(atomic ratio 1∶4)and Cr element were used as targets.The Cr target was mainly used for bombardment cleaning and deposition of a CrN transition layer.Cemented carbide(25 mm×25 mm×3 mm),superalloy(25 mm×25 mm×2 mm)and single crystal silicon wafer(30 mm×10 mm×0.67 mm)were used as experimental substrates.A series of AlCrMoSiN coatings with different Mo contents were developed by adjusting the sputtering power of the CrMo target(0-0.8 kW)at the deposition temperature of 400℃and the deposition pressure of 1.6 Pa.The microstruc

关 键 词：AlCrMoSiN涂层 高功率脉冲磁控溅射 脉冲直流磁控溅射 Mo含量 力学性能 摩擦学行为 

分 类 号：TG156.88[金属学及工艺—热处理] TB114.2[金属学及工艺—金属学]