镍及其合金超精密抛光技术研究进展  

Research Progress in Ultra-precision Polishing Techniques of Nickel and Its Alloys

作　　者：韩嘉茹 蒋淼锦 陈倚 魏雅晓 乔冬升 徐姿仪 弓爱君[1,2] HAN Jiaru;JIANG Miaojin;CHEN Yi;WEI Yaxiao;QIAO Dongsheng;XU Ziyi;GONG Aijun(School of Chemistry and Biological Engineering,University of Science and Technology Beijing,Beijing 100083,china;Beijing Key Laboratory for Science and Application of Functional Molecular and Crystalline Materials,University of Science and Technology Beijing,Beijing 100083,china;School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,china)

机构地区：[1]北京科技大学化学与生物工程学院,北京100083 [2]北京科技大学功能分子与晶态材料科学与应用北京市重点实验室,北京100083 [3]北京科技大学材料科学与工程学院,北京100083

出　　处：《表面技术》2025年第1期97-109,共13页Surface Technology

基　　金：北京科技大学教育教学重大教改项目(JG2021ZD01);北京科技大学校级规划教材项目(JC2021YB040);大学生创新创业项目。

摘　　要：镍及其合金作为高新技术领域的重要基础材料,对其表面质量的要求日益提升。然而,由于其韧性高、硬度高、导热系数小,可加工性较差,传统表面加工方法存在加工硬化、表面划痕、加工效率低等问题,因此对镍及其合金进行超精密抛光已成为一个极其重要的研究方向。聚焦于高效率、高质量、低损伤抛光,综述了应用于镍及其合金加工的电化学抛光(ECP)、化学机械抛光(CMP)、磁流变抛光(MRF)与激光抛光(LP)技术的原理、特点以及国内外研究现状。从表面质量、抛光效率、形状限制、环境污染以及加工成本这几个方面对各超精密抛光技术进行了对比,并概述了不同抛光技术的优缺点,分析了不同种类镍合金所适用的抛光方法。归纳总结发现,ECP与CMP成本较低,是目前加工镍及其合金的主流方式,但其抛光液存在污染。MRF与LP对环境友好,可用于复杂形状表面的抛光,但操作过程复杂、成本较高。最后基于目前镍及其合金超精密抛光所存在的问题与现有的技术,对超精密抛光技术的发展趋势进行了展望,以期为进一步研究镍及其合金的超精密抛光提供理论指导。Nickel and its alloys are indispensable basic materials in the high-tech field,and there is an increasing demand for the surface quality of nickel and its alloys.However,due to their high toughness,high hardness and low thermal conductivity,the machinability of nickel and its alloys is poor.The traditional surface processing methods are prone to cause work hardening and surface scratches,as well as low processing efficiency.Therefore,the ultra-precision polishing of nickel and its alloys has become an extremely significant research direction.Focusing on high efficiency,high surface quality and low surface damage polishing,this paper reviews the principles,characteristics and research status of the electrochemical polishing(ECP),chemical mechanical polishing(CMP),magneto-rheological finishing(MRF)and laser polishing(LP)for nickel and its alloys.The different ultra-precision polishing techniques are compared in terms of surface roughness,surface damage,processing efficiency,shape limitation,environmental pollution,and processing cost.Furthermore,this paper summarizes the advantages and disadvantages of each polishing technique.ECP and CMP are the two most widely used polishing methods in processing of nickel and its alloys.ECP has a series of processing characteristics such as no restrictions on workpiece geometry and size,no residual stress,no surface damage,high processing efficiency and high surface quality.CMP can achieve global planarization of materials through the dual coupling effect of chemical corrosion and mechanical removal,ensuring high material removal rate while achieving low surface roughness.However,the above two methods involve chemical reagents in their polishing slurries that can react with the workpiece,resulting in surface contamination on nickel and its alloys.Additionally,these techniques typically use strong acid,strong alkali and highly corrosive chemicals which can cause certain harm to the experimental operators and the environment.As a flexible polishing method,MRF can be used for ultra

关 键 词：镍合金 抛光 材料去除机理 抛光效率 表面质量 超精密 

分 类 号：TG356.28[金属学及工艺—金属压力加工]