功率超声对无掩膜定域性电沉积三维镍质微结构成型过程的影响  

Effect of Power Ultrasound on Forming Process of Three-dimensional Nickel Microstructure in Mask-less Localized Electrodeposition

作　　者：吴蒙华 姜炳春[1] 肖雨晴 贾卫平[2] WU Menghua;JIANG Bingchun;XIAO Yuqing;JIA Weiping(School of Mechanical and Electrical Engineering,Guangdong University of Science and Technology,Dongguan 523083,Guangdong,China;School of Mechanical Engineering,Dalian University,Dalian 116622,Liaoning,China)

机构地区：[1]广东科技学院机电工程学院,广东东莞523083 [2]大连大学机械工程学院,辽宁大连116622

出　　处：《材料导报》2025年第1期235-240,共6页Materials Reports

基　　金：国家自然科学基金(51875071);广东省普通高校科研重点项目(2023ZDZX3048)。

摘　　要：提高高深宽比三维金属微结构成型精度一直是微电子信息制造、MEMS等领域的研究重点。以制备直径为60μm、长径比为8∶1的微镍柱为例,在无掩膜定域性电沉积(MLED)微镍柱过程中,施加一定强度、与电场作用方向相同的功率超声波,探讨超声波对无掩膜定域性电沉积三维镍质微结构成型过程的影响。主要开展了无功率超声作用及有功率超声作用下MLED制备微镍柱过程中平均体积沉积速率、表面形貌及晶粒尺寸的对比研究。结果表明:相较于无功率超声作用,有功率超声作用下MLED的平均体积沉积速率可提高28%~39%,最高平均体积沉积速率可达15340.46μm^(3)/s;功率超声作用可进一步细化沉积体的晶粒尺寸,平均晶粒尺寸可达46.37 nm;同时,功率超声作用可在一定程度上改善MLED微镍柱的微观表面形貌。Improving the forming accuracy of three-dimensional metal microstructures with high aspect ratio has always been a research focus in micro-electronic information manufacturing,MEMS and other fields.In the deposition process of mask-less localized electrodeposition(MLED)of micro-nickel pillars with diameter of 60μm and aspect ratio of 8:1,power ultrasound of certain strength,in the same direction to the electric field,was applied for exploring the influence of magnetic field on forming process of three-dimensional nickel microstructure in MLED.A comparative study of the average volumetric deposition rate,surface morphology and grain size during MLED of micro-nickel pillars without and under action of power ultrasound was carried out.The results show that the power ultrasound may increase the average volumetric deposition rate of MLED to 28%-39%compared to without power ultrasonic action,and the the highest average volumetric deposition rate was 15340.46μm^(3)/s;at the same time,the effect of power ultrasound may further refine the grain size of sedimentary bodies,and the average grain size may reach 46.37 nm.Furthemore,the power ultrasound may improve the cylindricity and the microscopic surface morphology of micro-nickel pillars to a certain extent during MLED.

关 键 词：功率超声 无掩膜定域性电沉积(MLED) 三维镍质微结构 成型过程 

分 类 号：TQ153.1[化学工程—电化学工业]