聚焦超声辅助激光加工装置优化设计研究  

Research on optimization design of focused ultrasound assisted laser processing system

作　　者：王旭 任坤 刘毅 戴龙杰 王津 刘国梁 WANG Xu;REN Kun;LIU Yi;DAI Longjie;WANG Jin;LIU Guoliang(School of Mechanical and Automotive Engineering,Qingdao University of Technology,Qingdao 266520,CHN;College of Mechanical Engineering,Suzhou University of Science and Technology,Suzhou 215009,CHN;Qingdao Choho Industrial Co.,Ltd.,Qingdao 266700,CHN)

机构地区：[1]青岛理工大学机械与汽车工程学院,山东青岛266520 [2]苏州科技大学机械工程学院,江苏苏州215009 [3]青岛征和工业股份有限公司,山东青岛266700

出　　处：《制造技术与机床》2025年第2期81-89,共9页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金面上项目(52375446);山东省泰山产业领军人才项目;机械传动国家重点实验室开放基金项目(SKLMT-MSKFKT-202105)。

摘　　要：激光加工凭借其高精度、灵活性、通用性及无污染等优点在表面织构加工、微孔加工等领域展现了极大的应用潜力。为进一步提升激光加工的效率和质量,设计一种新型聚焦超声辅助激光加工装置,实现常规纳秒激光与超声波的同步、高效聚焦,提升聚焦超声辅助激光加工技术的效率和通用性。实验结果表明,优化后的聚焦超声辅助激光加工装置可以显著提升超声波聚焦效果,焦点处最大声压为聚焦超声换能器的1.75倍,显著提升了碳化硅陶瓷微孔加工的效率和精度。Laser processing has many advantages such as high precision,flexibility,universality,and pollution-free,which have great potential for surface texturing and micro-hole processing.In order to further improve the efficiency and quality of laser processing,this study designed a novel focused ultrasonic assisted laser processing device,which realized the synchronous and efficient focusing of conventional nanosecond laser and ultrasonic wave,and improved the efficiency and universality of focused ultrasonic assisted laser processing technology.Experimental results show that the optimized ultrasonic-assisted laser processing device markedly improves the ultrasonic focusing effect,achieving a maximum sound pressure at the focus that is 1.75 times greater than that of the focused ultrasonic transducer,thereby significantly enhancing both the efficiency and precision of microhole fabrication in silicon carbide ceramics.

关 键 词：聚焦超声 激光加工 加工装置 优化设计 微孔加工 

分 类 号：TH16[机械工程—机械制造及自动化]