纳米孔阵列微悬臂梁设计与力学特性研究  

Design and mechanical property research of nanoporous array microcantilevers

作　　者：孟青 赵静楠 郭志全[1,2] 朱静雪 杨嫄 MENG Qing;ZHAO Jingnan;GUO Zhiquan;ZHU Jingxue;YANG Yuan(College of Mechnical Engineering,Tianjin University of Science and Technology,Tianjin 300222,China;Tianjin Key Laboratory of Integrated Design and On-line Monitoring for Light Industry&Food Machinery and Equipment,Tianjin 300222,China;China Special Equipment Testing and Research Institute,Beijing 100026,China)

机构地区：[1]天津科技大学机械工程学院,天津300222 [2]天津市轻工与食品工程机械装备集成设计与在线监控重点实验室,天津300222 [3]中国特种设备检测研究院,北京100026

出　　处：《传感器与微系统》2025年第2期31-34,共4页Transducer and Microsystem Technologies

摘　　要：微悬臂梁阵列生物传感器因其强大的适用性和快速响应特性,在无标记生物分子的检测工作中广泛应用。为提高传统微悬臂梁传感器的灵敏度,设计了具有纳米孔洞结构的微悬臂梁,并详细模拟了单个微悬臂梁的固有频率及其在集中载荷作用下自由端的弯曲位移,进一步研究了纳米孔洞结构如何改善微悬臂梁传感器的力学性能,以确定微悬臂梁传感器的最佳纳米孔洞几何参数。结果表明:经过设计改进后的微悬臂梁自由端弯曲位移增加了1.21%。设计的纳米孔洞结构微悬臂梁有效提高了灵敏度,为微悬臂梁的进一步优化设计和工艺改进提供了新的策略。The microcantilevers array biosensors are widely applied in label-free biomolecule detection due to their strong versatility and rapid response characteristics.In order to enhance the sensitivity of traditional microcantilevers sensors,microcantilevers with nanoporous structures are designed.The natural frequency of a single microcantilever and the bending displacement of the free end under concentrated loading are simulated to further investigate how the nanoporous structure improves the mechanical performance of microcantilevers sensors,so as to determine the optimal nanoporous geometric parameters of the microcantilever sensors.The results show that the free end bending displacement of the designed and improved microcantilever is increased by 1.21%.The designed nanoporous structure in the microcantilever improve the sensitivity,providing a new strategy for further optimization design and process improvement of microcantilevers.

关 键 词：微悬臂梁 灵敏度 纳米孔洞 力学性能 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]