FeCoB/Ni-Zn铁氧体多层膜芯片电感近GHz优异电感特性  

FeCoB/Ni-Zn ferrite multilayer film chip inductors with excellent inductive properties at near-GHz frequencies

作　　者：赵晨阳 邹吕宽 赵雪 罗曦 何峻[1] 曾中明[2] 赵栋梁[1] ZHAO Chenyang;ZOU Lkuan;ZHAO Xue;LUO Xi;HE Jun;ZENG Zhongming;ZHAO Dongliang(Division of Function Materials,Central Iron and Steel Research Institute Co.,Ltd.,Beijing 100081,China;Suzhou Institute of Nano-Tech and Nano-Bionics(SINANO),Chinese Academy of Science,Suzhou 215123,Jiangsu,China)

机构地区：[1]钢铁研究总院有限公司功能材料研究院,北京100081 [2]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《金属功能材料》2024年第6期124-128,共5页Metallic Functional Materials

基　　金：国家重点研发计划项目(2023YFB3809201)。

摘　　要：提出了一种基于FeCoB/Ni-Zn铁氧体多层薄膜的分段磁芯结构,用于设计和制备新型跑道型薄膜电感元件。通过磁控溅射法制备了具有高饱和磁化强度和面内磁各向异性的FeCoB/Ni-Zn铁氧体多层薄膜,并将其作为磁芯材料。结果表明,该新型电感在500MHz下的Q值提高了20%,工作频率达到了900MHz,展现了优异的近GHz电感特性。分段磁芯结构有效抑制了涡流损耗,而多层薄膜的高饱和磁化强度和面内磁各向异性则提高了电感的稳定工作频率。为高性能芯片电感的设计提供了新的思路,有望满足边缘设备对电源管理系统的严苛要求。A segmented magnetic core structure based on FeCoB/Ni-Zn ferrite multilayer films for the design and fabrication of novel racetrack-type thin-film inductive components was proposed.FeCoB/Ni-Zn ferrite multilayer films with high saturation magnetization and in-plane magnetic anisotropy were fabricated using magnetron sputtering and employed as the core material.The results show that the new inductor exhibits a 20%increase in Qfactor at 500MHz,with a working frequency reaching 900MHz,demonstrating excellent inductive characteristics near-GHz frequencies.The segmented magnetic core structure effectively suppresses eddy current losses,while the high saturation magnetization and in-plane magnetic anisotropy of the multilayer films enhance the stable operating frequency of the inductor.New insights was provided for the design of high-performance chip inductors and holds promise for meeting the stringent requirements of power management systems in edge devices.

关 键 词：芯片电感 FeCoB/Ni-Zn铁氧体 多层薄膜 分段磁芯 高频性能 

分 类 号：TM2[一般工业技术—材料科学与工程]