端面抽运窄脉宽高转化率全固态532nm激光器  

High conversion,end-pumped small pulse width 532 nm all-solid-state laser

作　　者：吕锋 康恺 邓俊杰 LYU Feng;KANG Kai;DENG Junjie(Wuhan Huaray Precision Laser Co.Ltd.,Wuhan 430000,China)

机构地区：[1]武汉华日精密激光股份有限公司,武汉430000

出　　处：《激光技术》2025年第1期48-52,共5页Laser Technology

摘　　要：为了得到高转化率与窄脉宽的绿光激光器,利用两个最大功率为80 W、中心波长为878 nm、线宽1 nm的激光二极管抽运源,端面抽运两个Nd∶YVO 4晶体,经过光阑选模和声光Q晶体调制后,利用三硼酸锂晶体将1064 nm基频光倍频后导出腔外,整体采用平凸非稳腔方式控制晶体热透镜效应,得到了在工作模式下稳定输出的532 nm绿光激光器。结果表明,当重复频率为100 kHz、两个抽运模块抽运功率都为70 W时,激光器的输出功率为36.7 W,脉宽7.3 ns,光光转化效率约为26.2%,光斑圆度大于90%且焦点光斑圆度大于97%,在80 kHz~200 kHz工作条件下,脉冲抖动小于2%,该参数绿光激光器在进行玻璃钻孔工艺时,崩边在100μm范围内,优于同类型激光器。该研究对于改善纳秒激光器产品工艺效果、拓展产品应用范围是有帮助的。In order to obtain a green laser with high conversion rate and narrow pulse width,the pumping source of the laser consists of two 80 W laser diodes with a center wavelength of 878 nm and a line width of 1 nm was adopted.Two Nd∶YVO 4 were pumped end-face of the laser.The diaphragm mode selection and acousto-optic Q crystal modulate the YVO 4 crystal,and the LiB 3O 5(LBO)crystal doubles the frequency before exporting the light with the 1064 nm fundamental frequency out of the cavity.A stable 532 nm green laser with a stable output was achieved when the flat convex unstable cavity regulates the crystal’s thermal lens effect.The results show that,under operating conditions between 80 kHz and 200 kHz,the green laser’s repetition frequency is 100 kHz,its pump power is both 70 W,its output power is 36.7 W,its pulse width is 7.3 ns,its light conversion efficiency is approximately 26.2%,its spot roundness and focus spot roundness are both greater than 90%and 97%,and its pulse stability is less than 2%,respectively.It has been verified that the parameter green laser has a better performance than other lasers of the same type in glass drilling,with the edge collapse range controlled within 100μm.This study is significantly helpful in optimizing the process effect of nanosecond laser products and expanding the application scope of products.

关 键 词：激光器 全固态激光器 谐振腔设计 激光晶体 

分 类 号：TN242[电子电信—物理电子学] TN248.1