2维超大行程快反镜的分段非线性拟合标定  

Segmental nonlinear fitting calibration of 2-D ultra large stroke fast steering mirror

作　　者：李晓天 陈青山[1] 王艳林[1] 刘力双[1] LI Xiaotian;CHEN Qingshan;WANG Yanlin;LIU Lishuang(School of Instrument Science and Optoelectronics Engineering,Beijing Information Science and Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100192

出　　处：《激光技术》2025年第1期87-91,共5页Laser Technology

摘　　要：为了实现集高速扫描与精确指向功能于一体的2维超大行程快速反射镜(快反镜)的高重复定位精度与分辨率,采用分段标定方法,设计了2维超大行程快反镜角度标定系统;对多项式拟合法进行优化得到分段式非线性拟合法,并对标定模型进行了理论分析和实验测试。结果表明,在±5°范围内,传统的多项式拟合法标定误差最高达1.7 mrad,而优化后的分段式非线性拟合法在±5°标定的拟合误差小于8.2μrad,x、y轴分辨率分别可达4.6μrad和5.6μrad,x、y轴重复定位精度分别为19.4μrad和9.6μrad。此研究对精确控制2维超大行程快反镜有重要的作用。In order to achieve high repeatability and resolution of a 2-D ultra large stroke fast steering mirror(FSM)that integrates high-speed scanning and precise pointing functions,the 2-D segmental calibration was studied.The angle calibration system of 2-D ultra large strok FSM was constructed.The polynomial fitting method was optimized to obtain the segmental nonlinear fitting method,the calibration model was theoretically analyzed and experimentally tested.The results show that with the range of±5°,the calibration error of the traditional polynomial fitting method is merely 1.7 mrad,while the fitting error of the optimized segmental nonlinear fitting method is less than 8.2μrad,and the resolution of x and y axes can reach 4.6μrad and 5.6μrad respectively,and the repeatability of x and y axes is 19.4μrad and 9.6μrad respectively.This result plays an important role in the accurate control of 2-D ultra large stroke FSM.

关 键 词：光学器件 超大行程快反镜 分段非线性拟合 系统标定 

分 类 号：TN202[电子电信—物理电子学] TH274[机械工程—机械制造及自动化]