基于叉指结构的片上小电容标准单元研究  

Research on On-chip Small Capacitance Standard Cell Based on Interdigital Structure

作　　者：赵硕 冉自煊 陈建 杨雁[1,2] ZHAO Shuo;RAN Zixuan;CHEN Jian;YANG Yan(National Institute of Metrology,Beijing 100029,China;Key Laboratory of Electrical Quantum Standards,State Administration for Market Regulation,Beijing 100029,China)

机构地区：[1]中国计量科学研究院,北京100029 [2]国家市场监督管理总局重点实验室(电学量子基准),北京100029

出　　处：《计量学报》2025年第1期14-18,共5页Acta Metrologica Sinica

基　　金：国家重点研发计划项目(2022YFF0605503)。

摘　　要：基于Schwarz-Christoffel变换,对叉指电容结构的电容值进行了理论计算,通过理论计算和仿真分析,研究了叉指电容结构几何尺寸和电极对数对片上小电容标准单元的影响,并实现了电容值在10 fF~100 fF的叉指结构电容标准单元的制备和测试验证。测试结果表明,片上小电容标准单元的电容值随着叉指电极长度和对数增加电容值的改变将越趋近于线性变化,在10 fF~100 fF范围内片上小电容标准单元的标准不确定度优于0.5%×C+100 aF(C为电容值)。研究结果为进一步制作更宽范围的片上小电容标准单元提供研究基础。The interdigital capacitance is theoretically calculated using the Schwarz-Christoffel transform method.Through a combination of theoretical calculations and simulation analysis,the study investigates the influence of the geometric size of the interdigital capacitor structure and the number of electrodes on the on-chip small capacitance standard cell.The preparation and test verification of interdigital capacitor standard units with capacitance values ranging from 10 fF to 100 fF have been realized.Test results indicate that the on-chip small capacitance standard cells become more linearly dependent on the changes in capacitance as the length and number of interdigitated electrodes increase.In the range of 10 fF to 100 fF,the standard uncertainty of an on-chip small capacitance standard cell is better than 0.5%×C+100 aF(where C is the capacitance).It provides a research basis for the further production of a wider range of on-chip small capacitance standard cells.

关 键 词：电磁计量 飞法 片上电容标准单元 叉指结构 Schwarz-Christoffel变换 

分 类 号：TB97[一般工业技术—计量学]