150 mV脉冲驱动交流量子电压芯片的研制  

Development of 150 mV Pulse-driven AC Quantum Voltage Chip

作　　者：徐思思 程千硕 李晓宇 韩琪娜 钟青[2] 李劲劲[2] 曹文会[2] 钟源[2] XU Sisi;CHENG Qianshuo;LI Xiaoyu;HAN Qina;ZHONG Qing;LI Jinjin;CAO Wenhui;ZHONG Yuan(College of metrology and measurement engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Harbin Institute of Technology,Harbin,Heilongjiang 150001,China)

机构地区：[1]中国计量大学,计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]哈尔滨工业大学,黑龙江哈尔滨150001

出　　处：《计量学报》2025年第1期25-29,共5页Acta Metrologica Sinica

基　　金：国家重点研发计划(2022YFF0608301);国家自然科学基金(61971471)。

摘　　要：超导芯片是脉冲驱动任意波形合成系统(JAWS)系统的核心。由中国计量科学研究院(NIM)自行研制的JAWS芯片,采用渐变波导结构以补偿阵列中不同位置的约瑟夫森结所感受到的差异化驱动脉冲强度,通过测试芯片的I-V特性曲线,以及使用脉冲序列驱动芯片合成交流信号来验证芯片的电学性能。测试结果表明:芯片中集成的8000个约瑟夫森结全部正常工作,成功研制了有效值150 mV交流、1 kHz量子电压信号输出的超导芯片,高次谐波的幅值比基频低105 dB。The superconducting chip is the core part of the Josephson arbitrary waveform synthesizer(JAWS)system.In the JAWS chip developed by the National Institute of Metrology(NIM),tapered coplanar waveguide is utilized to compensate for variations in the driving pulse intensity experienced by Josephson junctions at different positions within the array.The electrical performance of the chip is verified through testing its I-V curves and synthesizing AC signals driven by pulses.In this chip,a Josephson junction array consisted by 40002-stack Nb/NbxSi1–x/Nb junctions,so there are totally 8000 junctions in serially connection.An oversampled delta-sigma pulse modulation system is used to generate a 14.4 Gbps bitstream to drive this Josephson junctions array.This array is capable to provide a 150 mV rms 1 kHz ac voltage output.The highest harmonic is the second,which is suppressed by at least 105 dBc.

关 键 词：电学计量 量子电压芯片 电压标准 脉冲驱动 渐变波导 约瑟夫森结 

分 类 号：TB971[一般工业技术—计量学]