基于激光陀螺测角仪的动态角度测量与谐波补偿  

Dynamic Angle Measurement with Harmonic Compensation Based on Laser Gyroscope Goniometry

作　　者：季岚青 黄垚 朱维斌 邹伟 Ji Lanqing;Huang Yao;Zhu Weibin;Zou Wei(School of Measurement and Testing Engineering,China University of Metrology,Hangzhou 310018,Zhejiang,China;Institute of Geometry,Chinese Academy of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院几何量所,北京100029

出　　处：《应用激光》2024年第11期111-118,共8页Applied Laser

基　　金：国家自然科学基金重点项目(51935004);基本科研业务重点领域(AKYZD2213)。

摘　　要：针对传统的角度测量方式(激光干涉仪测角法、自准直仪测角法等)无法对被测物体进行整圆周动态角度实时测量的不足,提出了一种圆光栅的动态角度测量与补偿方法,即使用激光陀螺测角仪对圆光栅进行动态角度实时测量。首先通过自校准算法对转台进行标定,然后使用自准直仪验证了标定后转台的精度为7.8″,再通过同步触发板将激光陀螺测角仪与读数头进行同步触发,分析不同转速下激光陀螺测角仪测得的转台角位置精度,找出激光陀螺测角仪测得的转台误差最小的转速,最后使用谐波分析法对该转速下的角度误差进补偿。实验结果表明,圆光栅测角系统的动态角度测量系统的精度由补偿前的8″提高到0.7″。Traditional angle measurement methods(laser interferometer angle measurement,autocollimator angle measurement,etc.)cannot measure the dynamic angle of the entire circumference of the measured object in real-time.Therefore,a dynamic angle measurement and compensation method for circular gratings is proposed,which uses a laser gyro goniometer to measure the dynamic angle of the circular grating in real time.Firstly,the turntable is calibrated using a self-calibration algorithm,and then the accuracy of the turntable after calibration is verified to be 7.8″using an autocollimator.Secondly,the laser gyro goniometer and the reading head are synchronously triggered by a synchronous trigger plate,analyze the angular position accuracy of the turntable measured by the laser gyro goniometer at different rotational speeds,find out the rotational speed with the smallest angle error measured by the laser gyro goniometer,and finally use the harmonic analysis method to compensate for the angle error at this rotational speed.The experimental results show that the accuracy of the dynamic angle measurement system of the circular grating angle measurement system is improved from 8“before compensation to 0.7”.

关 键 词：自校准算法 动态测角 激光陀螺测角仪 谐波补偿法 同步测角 

分 类 号：TH712[机械工程—测试计量技术及仪器]