Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals  

作　　者：Yuhao Xiao Kewen Zhu Jinzhao Han Sheng Liu Guoqiang Wu 

机构地区：[1]Institute of Technological Sciences,Wuhan University,Wuhan 430072,China [2]Hubei Yangtze Memory Laboratories,Wuhan 430205,China [3]School of Microelectronics,Wuhan University,Wuhan 430072,China

出　　处：《Chip》2024年第4期8-15,共8页芯片(英文)

摘　　要：In this article,a two-dimensional(2D)honeycomb lattice phononic crystal(PnC)based micro-oven with large bandgap is introduced to be integrated with piezoelectric microelectromechanical systems(MEMS)resonator to reduce anchor loss for timing applications.Finite element method(FEM)analysis and experimental measurement were performed to verify that the proposed PnC microoven design gives advantage in quality factor(Q).The measurement results demonstrate that the resonator with 2D honeycomb lattice PnC micro-oven shows a repeatable 1.7 times improvement of average Q compared with the bare one.The resonator with micro-oven control was further measured for frequency stability.The proposed piezoelectric micro-oven-controlled MEMS resonator achieves a frequency stability of less than±10 ppb in a stable environment,which indicates promising potential for application in high-end timingfield.

关 键 词：Phononic crystal Microelectromechanical systems Micro-oven Piezoelectric resonator 

分 类 号：TN7[电子电信—电路与系统]