半导体级高纯石英砂纯化装备及工艺研究  

Research on Purification Process of High-Purity Quartz Sand

作　　者：杨静 田冬龙 吴忠举 王晓峰 周世豪 Yang Jing;Tian Donglong;Wu Zhongju;Wang Xiaofeng;Zhou Shihao(CETC Shanxi Electronic Equipment Co.,Ltd.,Taiyuan,Shanxi 030024)

机构地区：[1]山西中电科电子装备有限公司,山西太原030024

出　　处：《非金属矿》2025年第1期50-53,共4页Non-Metallic Mines

摘　　要：目前我国高纯石英砂大量依赖进口,且高品质石英原矿进口受到国外企业限制,因此迫切需要解决我国石英砂提纯技术落后的现状。本研究通过对石英砂提纯技术和杂质进行分类总结,自主研发了石英砂纯化装备,提出了一种新型石英砂纯化工艺:真空焙烧-氯化焙烧联合提纯法。结果表明,随着温度升高,工艺过程压力减小,杂质含量不断减少,纯化效果越显著。温度为1300℃,工艺过程压力为10 Pa,石英砂纯化效果最佳,碱金属元素Li、Na、K去除率分别达到95.24%、97.92%、96.61%,较难去除的Al和Ti元素含量也有所降低,杂质总含量从12.60×10^(-6)降至7.25×10^(-6),去除率达到42.46%,同时对石英砂内部气液包裹体也有明显去除效果,石英砂纯度等级从4N8级提纯至5N2级,达到半导体级高纯石英砂的标准。At present,China’s high-purity quartz sand is heavily dependent on imports,and the import of high-quality quartz raw ore is restricted by foreign enterprises,so there is an urgent need to solve the current backward situation of China’s quartz sand purification technology.In this paper,by classifying and summarizing the quartz sand purification technology and impurities,we research and develop a quartz sand purification equipment independently,and propose a new type of quartz sand purification process:vacuum roasting-chlorine roasting combined purification method.The results show that with the increase in temperature,the process pressure decreases,the impurity content is decreasing,the purification effect is more significant.When the temperature is 1300℃,and the process pressure is 10 Pa,quartz sand purification effect is the most significant,the alkali metal elements Li,Na,K removal rates are 95.24%,97.92%,96.61%.The contents of Al and Ti elements difficult to remove have also been reduced.The total content of impurities is decreased from 12.60×10^(-6) to 7.25×10^(-6),the removal rate reaches 42.46%.At the same time,the gas-liquid inclusions inside the quartz sand are also obviously removed,and the purity grade of quartz sand is purified from 4N8 grade to 5N2 grade,meets the standard of semiconductor grade high purity quartz sand.

关 键 词：半导体级高纯石英砂 石英砂纯化装备 真空焙烧-氯化焙烧联合提纯 提纯工艺 高温 高真空 

分 类 号：TD985[矿业工程—选矿]