Focus on sub-nanometer measurement accuracy:distortion and reconstruction of dynamic displacement in a fiber-optic microprobe sensor  

作　　者：Yisi Dong Wenrui Luo Wenwen Li Chen Zhang Pengcheng Hu Haijin Fu Hongxing Yang Ruitao Yang Yongkang Dong Jiubin Tan 

机构地区：[1]Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology,Harbin 150080,China [2]Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China [3]National Key Laboratory of Science and Technology on Tunable Laser,Harbin Institute of Technology,Harbin 150001,China

出　　处：《Light(Advanced Manufacturing)》2024年第4期121-135,共15页光(先进制造)(英文)

基　　金：supported by the National Key Research and Development Projects of China(No.2022YFF0705802);National Natural Science Foundation of China(62305090);China Postdoctoral Science Foundation(2023M730883);Fellowship of China National Postdoctoral Program for Innovative Talents(BX20230478).

摘　　要：We established a complete model and relationship between laser source characteristics and measurement accuracy of high precision fiber microprobe sensor(FMS)based on phase generated carrier demodulation.The laser carried out high-bandwidth frequency modulation to improve the measurement speed.Meanwhile,the laser also carried out large-amplitude frequency modulation to eliminate tens of nanometers of nonlinear error,thus improving the measurement accuracy.Further,the laser center wavelength is required to be stabilized under the above modulation to achieve a high measurement stability.The conflict between laser frequency modulation and central stability is revealed and analyzed alongside the distortion of measurement accuracy.A modified frequency stabilization method for laser source under high-bandwidth and large-amplitude modulation is proposed for improving measurement accuracy to realize sub-nanometer precision.The experimental results showed that when the modulation bandwidth was 1 MHz and maximum modulation amplitude was 2.61 GHz,the distributed feedback laser central wavelength stability was 2.9×10^(−10)(τ=1s)according to Allan variance.Additionally,the relative expanded uncertainty of the laser wavelength was demonstrated to be superior to 5×10^(−8)(k=2)within 3 hr,which was at least one order of magnitude higher than that of the traditional method.The resolution and stability of FMS is better than 0.4 nm,and the nonlinear error is reduced from tens of nm to 0.8 nm,which meets the requirements of sub-nanometer measurements.

关 键 词：Displacement measurement Fiber microprobe sensor High-bandwidth and large-amplitude frequency modulation Central wavelength stability Sub-nanometer measurements 

分 类 号：TN2[电子电信—物理电子学]