光纤耦合间接电子探测器结构设计及其实验结果  

The Design and Experimental Results of Fiber Optic Plate Coupled Indirect Electron Detector

作　　者：彭华兴 刘术林[1,2] 梁晶 闫保军 刘辉 刘翔宇 张斌婷 王建铭 焦朋 张洋 独雅婕 PENG Huaxing;LIU Shulin;LIANG Jing;YAN Baojun;LIU Hui;LIU Xiangyu;ZHANG Binting;WANG Jianming;JIAO Peng;ZHANG Yang;DU Yajie(State Key Laboratory of Particle Detection and Electronics,The Institute of High Energy Physics of the Chinese Academy of Sciences,Beijing 100049,China;School of Nuclear Science and Technology,University of Chinese Academy of Sciences,Beijing 100049,China;Suzhou Bozhong Instruments Technology Co.,Ltd,Suzhou 215200,China;China Building Materials Academy Co.,Ltd,Beijing 100024,China;CNBM Photonics Technology Co.,Ltd,Zaozhuang 277000,China)

机构地区：[1]中国科学院高能物理研究所核探测与核电子学国家重点实验室,北京100049 [2]中国科学院大学核科学与技术学院,北京100049 [3]苏州博众仪器科技有限公司,苏州215200 [4]中国建筑材料科学研究总院有限公司,北京100024 [5]中建材光子科技有限公司,枣庄277000

出　　处：《真空科学与技术学报》2025年第1期14-20,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：依据透射电子显微镜中透射电子成像的特点,设计出纤维光学面板耦合CMOS相机的间接电子成像探测器,分别改变荧光粉层和铝膜的厚度,发现在相同条件下,薄荧光粉相较于厚荧光粉可以得到更亮的图像;在较小范围内,铝膜厚度的改变对图像亮度几乎无影响;考虑到微通道板对高能电子有一定的探测效率,尝试在荧光屏前放置微通道板,测试结果表明微通道板能够有效提高图像亮度,其在700 V工作电压下,荧光屏亮度较未安装微通道板的情况提高了30倍,并且微通道板能够屏蔽X射线,更换成本较低,可能是间接电子探测器的一个新选择。According to the characteristics of transmission electron imaging in the transmission electron microscope,an indirect electron imaging detector coupling a fiber optics plate with a CMOS camera was designed.By varying the thickness of the phosphor layer and the aluminum film,respectively,it was found that under the same conditions,thinner phosphor layers could obtain brighter images than the thicker ones.Within a small range,changing the thickness of the aluminum film had little effect on image brightness.Considering the detection efficiency of the microchannel plate(MCP)for high-energy electrons,attempts were made to place the MCP in front of the phosphor screen.Test results showed that the MCP effectively increased image brightness,with a 30-fold increase in screen brightness at a working voltage of 700 V compared to the situation without the MCP.Considering the ability of the MCP to shield X-rays and its relatively low replacement cost,it may be a new choice for indirect electron detectors.

关 键 词：荧光粉 铝膜 微通道板 光纤耦合 透射电子显微镜 

分 类 号：TG115.215.3[金属学及工艺—物理冶金]