铟锡氢氧化物的煅烧温度对ITO靶材结构性能的影响  

Effect of calcination temperature of indium tin hydroxide onstructure and properties of ITO target

作　　者：张倍维 陆映东 黄作 莫斌 方志杰[2] 黄誓成 ZHANG Beiwei;LU Yingdon;HUANG Zuo;MO Bin;FANG Zhijie;HUANG Shicheng(Guangxi Crystal Union Photoelectric Materials Co.,Ltd.,Liuzhou 545006,Guangxi,China;School of Electronic Engineering,Guangxi University of Science and Technology,Liuzhou,545006,China;School of Material Science and Engineering,Central South University,Changsha 430083,China)

机构地区：[1]广西晶联光电材料有限责任公司,广西柳州545006 [2]广西科技大学电子工程学院,广西柳州545006 [3]中南大学材料科学与工程学院,长沙430083

出　　处：《功能材料》2025年第1期1209-1216,共8页Journal of Functional Materials

基　　金：国家自然科学基金项目(12364011);广西重点研发项目(桂科AB23026146)。

摘　　要：研究发现氧化锡铟(ITO)靶材的致密度受ITO前驱粉体烧结活性影响并取决于其结构和组成。而ITO前驱粉体煅烧温度对于ITO靶材结构及其性质的影响尚未明晰。探究铟锡氢氧化物粉体的煅烧形成ITO粉体过程中,温度对于其粉体的结构以及后续制备的ITO靶材的烧结致密化的影响。XRD衍射分析表明铟锡氢氧化物的粉末煅烧温度和时间的增加均会导致ITO粉体晶粒尺寸变大;当煅烧温度为750℃时(2 h),ITO粉体有较高的比表面积,高的表面金属含量构成,制备的靶材具有高的相对密度,更低的电阻率,靶材断面结构紧凑,内部气孔相对较少。前驱粉体煅烧温度与ITO靶材的结构-性能关系,揭示了煅烧温度直接影响铟锡氢氧化物粉体的立方晶体的形成,改变了生成的ITO粉体结构(比表面积、表面元素构成、粒度等),影响成型的素胚密度,进而影响ITO靶材的烧结致密性及导电性能。The density of the indium tin oxide(ITO)target depends on the sintering activity of the indium tin hydroxide powder,which is influenced by its structure and composition.However,the influence of the calcination temperature on the structure and properties of the ITO target is still unknown.In this work,the role of temperature on the structure of indium tin hydroxide powder and the sinter densification of ITO powder during the calcination of indium tin hydroxide powder was exposed.The XRD analysis showed that as the calcination temperature and/or time increased,the crystal size of the ITO powder increased.The ITO precursor powder calcined at 750℃for 2 hours had a large specific surface area and high surface metal content,resulting in the prepared ITO target having a relatively high specific gravity,lower resistivity and a compact cross-sectional structure with few internal parts pores.The relationship between the calcination temperature of the precursor powder and the structural properties of the ITO target illustrated that the calcination temperature directly affected the cubic crystal formation of indium tin hydroxide powder.The structure of the produced ITO powder(specific surface area,composition of surface elements,particle size,etc.)was then changed.Finally,this result influence the density of the formed embryo and determineld the sintering density and electrical conductivity of the ITO target.

关 键 词：铟锡氧化物 温度-结构-性能关系 锡(Sn)掺杂氧化铟(In2O3) ITO靶材 

分 类 号：TM283[一般工业技术—材料科学与工程] TB34[电气工程—电工理论与新技术]