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作 者:Siyu He Feixiang Tang Xiuming Liu Zhongjie Gao Fang Dong Sheng Liu
机构地区:[1]China-EU Institute for Clean and Renewable Energy,Huazhong University of Science and Technology,Wuhan,430074,China [2]Key Laboratory of Transients in Hydraulic Machinery,Ministry of Education,School of Power and Mechanical Engineering,Wuhan University,Wuhan,430072,China [3]The Institute of Technological Sciences,Wuhan University,Wuhan,430072,China [4]School of Mechanical Science and Engineering of HUST,Huazhong University of Science and Technology,Wuhan,430074,China
出 处:《Acta Mechanica Solida Sinica》2024年第6期989-1002,共14页固体力学学报(英文版)
基 金:supported by the National Key R&D Program of China(No.2022YFB3207100);the Hubei Provincial Strategic Scientist Training Plan(No.2022EJD009);the Fundamental Research Funds for the Central Universities(No.2042023kf1041).
摘 要:In micro-electro-mechanical systems,interface expansion issues are commonly encountered,and due to their small size,they often exist at the micro-or nano-scale.The influence of the micro-structural effect on interface mechanics cannot be ignored.This paper focuses on studying the impact of micro-structural effect on interface crack propagation.Modified couple stress theory(MCST)is used to study the buckling delamination of ultra-thin film-substrate systems.The equivalent elastic modulus(EEM)and equivalent flexural rigidity(EFR)are derived based on MCST.Substituting EEM and EFR into the classical Kirchhoff plate theory,the governing equations of ultra-thin film-substrate system with micro-structural effect can be obtained.The finite element method(FEM)was used to calculate the critical strain energy release rate for crack extension.Differences between the three theoretical approaches of MCST,classical theory(CT),and FEM were compared.The effects of stress ratioσ/σ_(c),initial crack length,film thickness,and micro-structural effect parameters on crack extension were analyzed.The results show that the FEM calculations coincide with the CT calculations.The stress ratioσ/σ_(c),initial crack length,film thickness,and micro-structural effect parameters have significantly influence crack extension.
关 键 词:Modified couple stress theory Equivalent elastic modulus Film-substrate system Micro-structural effect Critical strain energy release rate Finite element method
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