MLCC中二次排胶的镍氧化模型与电性能  

Electrical Properties and Nickel Oxidation Model in MLCC by Secondary BinderBurn-out

作　　者：黄翔 宋进祥 成佩瑶 洪克成 毛石武 HUANG Xiang;SONG Jinxiang;CHENG Peiyao;HONG Kecheng;MAO Shiwu(Guangdong Viiyong Electronic Technology Co.,Ltd.,Luoding 518057,China)

机构地区：[1]广东微容电子科技有限公司,广东罗定527200

出　　处：《电子工艺技术》2025年第1期39-42,共4页Electronics Process Technology

摘　　要：BME-MLCC中Ni电极的氧化对于电容器的电性能和可靠性是一个重要的因素。通过热力学数据,推导出Ni电极在高温下的平衡氧分压。根据二次排胶炉中气氛选择,结合加湿条件下的饱和水蒸气蒸发模型,最终得到了氢含量、加湿温度和炉温与实际氧分压的关系。通过比较该结果与平衡氧分压,就可以判断Ni电极是否会发生氧化。采用实际的二次排胶条件进行验证得出的试验数据与该模型能很好吻合。因此二次排胶温度越高,氢含量越低,MLCC容量也越高。The oxidation of Ni electrode is an important factor for the electrical performance and reliability in BME-MLCC.The equilibrium oxygen partial pressure of Ni electrode at high temperature is derived from thermodynamic data.The relationship between hydrogen content,humidification temperature,furnace temperature and actual oxygen partial pressure is finally obtained by the atmosphere selection in the secondary binder burn-out and the saturated steam evaporation model under humidification conditions.The oxidation of Ni electrode can be evaluated by comparing the equilibrium oxygen partial pressure with actual oxygen partial pressure.The model can match experimental data well in actual secondary binder burn-out conditions.It is found that the capacity of MLCC will increase as the secondary binder burn-out temperature increasing and the hydrogen content decreasing.

关 键 词：Ni电极氧化 二次排胶 平衡氧分压 

分 类 号：TN605[电子电信—电路与系统]