半导体器件参数测量时三同轴转接器的正确使用方法研究  

Method Research on Proper Use of TRB to BNC Adapters in Parametric Measurement of Semiconductor Devices

作　　者：阚劲松[1] 徐迎春[1] 丁然 沙长涛[1] KAN Jinsong;XU Yingchun;DING Ran;SHA Changtao(China Electronics Standardization Institute,Beijing,100176)

机构地区：[1]中国电子技术标准化研究院,北京100176

出　　处：《机电元件》2025年第1期46-51,共6页Electromechanical Components

摘　　要：介绍了一起误用三同轴——同轴BNC转接器导致测量结果错误的案例,对三同轴——同轴转接器的常见转换方式和半导体器件参数测试仪电源/测量单元(Source Meter Unit,简称SMU)的内部电路进行研究,分析案例中造成测量结果错误的原因是使用的转接器的连接方式不适用,并通过试验予以证实。最后,给出正确使用转接器的几种常见方式,提出在半导体器件参数测量中,应根据测量电流大小、SMU的电流回路和被测器件电路,正确选用适当的三同轴转接器,并在连接后实施开路、短路和电阻负载实验进行电路验证的建议。A case of misuse of TRB(Triaxial BNC)to BNC Adapters leading to incorrect results in the measurement of semiconductor diode IV characteristics is introduced.The common conversions of triax-coaxial converters and the internal circuit of the source measure unit of parametric measurement testers are analyzed.It is found that the cause of the measurement error in this case is the unsuitable connection of the converters used.Finally,this paper gives several modes of correctly using the adapter and gives suggestions on how to select the proper TRB-BNC adapter according to the measure current and current loop of the source measurement unit and the circuit of device under test in parametric measurement.Open-short-resistance(load)tests should be carried out for circuit verification after connection.

关 键 词：三同轴 同轴 转接器 电流回流 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]