基于级联柔性光栅的多点扫描显微系统设计  

Design of a Multipoint Scanning Microscope Using Cascaded Flexible Gratings

作　　者：付颜玮 曾嘉庆 马万卓 韩冬冬[2] 田少乾 刘智[1] 刘显著[1] 姜会林[1] Fu Yanwei;Zeng Jiaqing;Ma Wanzhuo;Han Dongdong;Tian Shaoqian;Liu Zhi;Liu Xianzhu;Jiang Huilin(Institute of Space Optoelectronics Technology,Changchun University of Science and Technology,Changchun 130022,Jilin,China;College of Electronic Science&Engineering,Jilin University,Changchun 130015,Jilin,China)

机构地区：[1]长春理工大学空间光电技术研究所,吉林长春130022 [2]吉林大学电子科学与工程学院,吉林长春130015

出　　处：《光学学报》2024年第21期112-123,共12页Acta Optica Sinica

基　　金：吉林省优秀青年基金(20240101020JJ);吉林省自然科学基金(YDZJ202201ZYTS418);重庆市自然科学基金(CSTB2023NSCQ-MSX0030)。

摘　　要：构建了基于级联柔性光栅的多点扫描显微系统理论模型。该系统采用1550 nm波长的光源,扫描部分由两个栅线方向相互垂直的柔性光栅构成,利用拉伸夹具对柔性光栅进行等比例拉伸,从而控制高级次衍射光斑的位置,实现在样品表面的二维扫描。为了验证该系统的理论可行性,使用ZEMAX软件对其进行仿真分析。在照明光路的仿真中,为了确保照明的高分辨率和低像差特征,设计了由多个透镜组成的显微物镜,其数值孔径NA=0.611,分辨率为1.547μm。衍射光斑在样品表面形成的扫描视场为23.4μm×23.4μm,9个衍射光斑的调制传递函数(MTF)在空间频率N=701 lp/mm处大于0.1。在发射光路中,衍射光斑的MTF在空间频率N=464 lp/mm处大于0.1。Objective Laser scanning microscopes use lasers as light sources to obtain high-resolution and high-contrast images of samples through point-by-point scanning.This method is characterized by non-contact,high efficiency,accuracy,dynamic analysis,and fast scanning speed,making it widely used in neuroscience,chemical raw materials,materials science,and biology research.Recent advancements in multipoint scanning microscope technology aim to improve both scanning speed and imaging resolution.Typically,scanning—whether single-point or multi-point—relies on controlling the motion of a motorized platform.However,the bulky and complex nature of these platforms results in poor dynamic performance.Flexible gratings,made from polymers such as polydimethylsiloxane(PDMS)and polymethyl methacrylate(PMMA),offer advantages including small size,high toughness,transparency,and ease of preparation.In this study,we propose a concept for a 1550 nm multipoint scanning microscope system utilizing two cascaded flexible gratings and construct its theoretical model.The theoretical feasibility of the system is verified through simulations of the illumination and emission light paths using ZEMAX software.We hope this method provides a new approach for efficient multipoint laser scanning.Methods In this study,two flexible gratings with perpendicular grating directions are used as scanning structures.We first develop a theoretical model and derive the corresponding formulas,which are then simulated using MATLAB to analyze factors affecting diffraction spot position changes.To further reduce spherical and other aberrations,we design objective lenses consisting of multiple lenses using ZEMAX and incorporate them into subsequent simulations of illumination and emission light paths.For the emission light path,the sample surface is modeled as a mirror,with reflected light serving as the light source.A multi-configuration editor is used to match the diffraction orders of the beam before and after passing through the cascaded flexible gratings.Fi

关 键 词：显微成像 柔性材料 级联光栅 多点扫描 

分 类 号：O439[机械工程—光学工程]